Sealing articles for plasma resistance applications
US-2025246390-A1 · Jul 31, 2025 · US
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Meng Chin-Han patents
Meng Chin-Han is listed as an inventor on 16 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Meng Chin-Han |
| Total patents | 16 |
| First publication | Oct 26, 2017 |
| Latest publication | Jul 31, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Anti-plasma coating
US-2025149302-A1 · May 8, 2025 · US
Method of fabricating semiconductor structure
US-10964547-B2 · Mar 30, 2021 · US
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
US-10957516-B2 · Mar 23, 2021 · US
Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
US-10654713-B2 · May 19, 2020 · US
Method of fabricating semiconductor strucutre
US-2020098583-A1 · Mar 26, 2020 · US
Method of fabricating semiconductor structure
US-10529578-B2 · Jan 7, 2020 · US
Method for manufacturing microelectromechanical system structure
US-2019256350-A1 · Aug 22, 2019 · US
Method of fabricating semiconductor strucutre
US-2019148161-A1 · May 16, 2019 · US
Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
US-10273152-B2 · Apr 30, 2019 · US
Recent patents
Latest publications not already listed above.
Method for manufacturing microelectromechanical system structure
US-2019092625-A1 · Mar 28, 2019 · US
Method for forming micro-electro-mechanical system (MEMS) device structure
US-10131539-B2 · Nov 20, 2018 · US
Multi-zone gas distribution plate (gdp) and a method for designing the multi-zone gdp
US-2018286634-A1 · Oct 4, 2018 · US
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
US-9997336-B2 · Jun 12, 2018 · US
Method for forming micro-electro-mechanical system (mems) device structure
US-2018148324-A1 · May 31, 2018 · US
Multi-Zone Gas Distribution Plate (GDP) and a Method for Designing the Multi-Zone GDP
US-2017309500-A1 · Oct 26, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 16 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P50/692 | 8 |
| H10P50/242 | 8 |
| H01L21/3081 | 8 |
| H01L21/3065 | 7 |
| H10P76/204 | 4 |