Matchless plasma source for semiconductor wafer fabrication
US-2026089828-A1 · Mar 26, 2026 · US
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Marsh Ricky patents
Marsh Ricky is listed as an inventor on 26 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Marsh Ricky |
| Total patents | 26 |
| First publication | Jun 16, 2015 |
| Latest publication | Mar 26, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Matchless plasma source for semiconductor wafer fabrication
US-12507338-B2 · Dec 23, 2025 · US
Matchless plasma source for semiconductor wafer fabrication
US-12490370-B2 · Dec 2, 2025 · US
Matchless plasma source for semiconductor wafer fabrication
US-12484139-B2 · Nov 25, 2025 · US
Matchless plasma source for semiconductor wafer fabrication
US-12471202-B2 · Nov 11, 2025 · US
Matchless plasma source for semiconductor wafer fabrication
US-2025220801-A1 · Jul 3, 2025 · US
Matchless plasma source for semiconductor wafer fabrication
US-2025212310-A1 · Jun 26, 2025 · US
Matchless plasma source for semiconductor wafer fabrication
US-2025203749-A1 · Jun 19, 2025 · US
Matchless plasma source for semiconductor wafer fabrication
US-2025203748-A1 · Jun 19, 2025 · US
Matchless plasma source for semiconductor wafer fabrication
US-2025106976-A1 · Mar 27, 2025 · US
Recent patents
Latest publications not already listed above.
Matchless plasma source for semiconductor wafer fabrication
US-12193138-B2 · Jan 7, 2025 · US
Matchless plasma source for semiconductor wafer fabrication
US-2023354502-A1 · Nov 2, 2023 · US
Matchless plasma source for semiconductor wafer fabrication
US-11716805-B2 · Aug 1, 2023 · US
Matchless plasma source for semiconductor wafer fabrication
US-2022117074-A1 · Apr 14, 2022 · US
Matchless plasma source for semiconductor wafer fabrication
US-11224116-B2 · Jan 11, 2022 · US
Matchless plasma source for semiconductor wafer fabrication
US-2020253034-A1 · Aug 6, 2020 · US
Matchless plasma source for semiconductor wafer fabrication
US-10638593-B2 · Apr 28, 2020 · US
Matchless plasma source for semiconductor wafer fabrication
US-2019215942-A1 · Jul 11, 2019 · US
Matchless Plasma Source for Semiconductor Wafer Fabrication
US-2019116656-A1 · Apr 18, 2019 · US
Matchless plasma source for semiconductor wafer fabrication
US-10264663-B1 · Apr 16, 2019 · US
TCCT match circuit for plasma etch chambers
US-10056231-B2 · Aug 21, 2018 · US
Systems for cooling RF heated chamber components
US-9978565-B2 · May 22, 2018 · US
Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil Zones
US-2016163569-A1 · Jun 9, 2016 · US
Faraday shield having plasma density decoupling structure between TCP coil zones
US-9293353-B2 · Mar 22, 2016 · US
Tcct match circuit for plasma etch chambers
US-2015235810-A1 · Aug 20, 2015 · US
TCCT match circuit for plasma etch chambers
US-9059678-B2 · Jun 16, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 26 |
| Marsh Ricky | 2 |
| Paterson Alex | 2 |
| Mcchesney Jon | 1 |
| Sriraman Saravanapriyan | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32183 | 22 |
| H05H2242/24 | 20 |
| H05H1/4652 | 20 |
| H05H1/466 | 20 |
| H03F3/2173 | 20 |