Systems for cooling RF heated chamber components
US-9978565-B2 · May 22, 2018 · US
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Mcchesney Jon patents
Mcchesney Jon holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Jul 14, 2015 |
| Latest publication | May 22, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Chamber filler kit for plasma etch chamber useful for fast gas switching
US-9679751-B2 · Jun 13, 2017 · US
System and method for testing an electrostatic chuck
US-9082805-B2 · Jul 14, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Systems for cooling RF heated chamber components
US-9978565-B2 · May 22, 2018 · US
Chamber filler kit for plasma etch chamber useful for fast gas switching
US-9679751-B2 · Jun 13, 2017 · US
System and method for testing an electrostatic chuck
US-9082805-B2 · Jul 14, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H01J37/32082 | 1 |
| H01J37/32522 | 1 |
| H01J37/32238 | 1 |
| H01J37/32119 | 1 |
| H10P50/244 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Chemistry & Metallurgy | 1 |
| Physics | 1 |