Faraday shield having plasma density decoupling structure between TCP coil zones

Patent metadata

Field	Value
Publication number	US-9293353-B2
Application number	US-201213658652-A
Country	US
Kind code	B2
Filing date	Oct 23, 2012
Priority date	Apr 28, 2011
Publication date	Mar 22, 2016
Grant date	Mar 22, 2016

Abstract

A Faraday shield and a plasma processing chamber incorporating the Faraday shield is are provided. The plasma chamber includes an electrostatic chuck for receiving a substrate, a dielectric window connected to a top portion of the chamber, the dielectric window disposed over the electrostatic chuck, and a Faraday shield. The Faraday shield is disposed inside of the chamber and defined between the electrostatic chuck and the dielectric window. The Faraday shield includes an inner zone having an inner radius range that includes a first and second plurality of slots and an outer zone having an outer radius range that includes a third plurality of slots. The inner zone is adjacent to the outer zone. The Faraday shield also includes a band ring separating the inner zone and the outer zone, such that the first and second plurality of slots do not connect with the third plurality of slots.

First claim

What is claimed is:

1. A plasma processing chamber, comprising:
an electrostatic chuck for receiving a substrate;
a dielectric window connected to a top portion of the chamber, the dielectric window disposed over the electrostatic chuck;
a transformer coupled plasma (TCP) coil having a substantially flat coil distribution that is disposed over the dielectric window;
a Faraday shield disposed inside of the chamber and defined between the electrostatic chuck and the dielectric window, the Faraday shield having a flat circular plate structure that is disposed under the dielectric window and inside the chamber; the Faraday shield includes,
(a) an inner zone having an inner radius range that includes a first and second plurality of slots;
(b) an outer zone having an outer radius range that includes a third plurality of slots, the inner zone being adjacent to the outer zone; and
(c) a band ring separating the inner zone and the outer zone, such that the first and second plurality of slots do not connect with the third plurality of slots,
wherein the inner zone and the outer zone are coupled together by way of the band ring,
wherein the band ring is part of the flat circular plate structure and the band ring has a width that is less than about 15 mm, the band ring is configured to decouple magnetic flux generation and having the width of the band ring less than 15 mm acts to prevent plasma blockage under the band ring that would cause power non-uniformities to transfer to a substrate when processed in the plasma processing chamber;

wherein the first, second and third plurality of slots are arranged and extend out radially from a center of the Faraday shield, and the Faraday shield is electrically grounded.

2. The plasma processing chamber as recited in claim 1 , wherein the transformer coupled plasma (TCP) coil is disposed over the dielectric window, the TCP coil includes an inner coil and an outer coil, the outer coil is disposed over the dielectric window such that the outer coil is substantially over the outer zone of the Faraday shield and the inner coil is substantially over the inner zone of the Faraday shield.

3. The plasma processing chamber as recited in claim 2 , wherein the inner coil and outer coil are connected to a tuning circuit, the turning circuit being configured to adjust magnetic flux imparted through either or both of the outer zone and inner zone of the Faraday shield.

4. The plasma processing chamber as recited in claim 1 , wherein each one of the slots are defined from a chevron shaped groove.

5. The plasma processing chamber as recited in claim 4 , wherein the chevron shaped groove does not include a line of sight between respective sides of the Faraday shield.

6. A Faraday shield for installation inside of a chamber, comprising:
a circular plate structure having a center hole, the circular plate structure being flat and configured to be disposed inside the chamber and below a dielectric window, the circular plate structure including,
(a) an inner zone having an inner radius range that includes a first and second plurality of slots;
(b) an outer zone having an outer radius range that includes a third plurality of slots, the inner zone being adjacent to the outer zone; and
(c) a band ring separating the inner zone and the outer zone, such that the first and second plurality of slots do not connect with the third plurality of slots;
wherein the inner zone and the outer zone are coupled together by way of the band ring;
wherein the band ring is part of the circular plate and the band ring has a width that is between about 1 mm and about 10 mm;
wherein the band ring is configured to decouple magnetic flux generation through each of the inner and outer zones and having the width of the band ring being less than 10 mm substantially prevents plasma blockage under the band ring that would cause power non-uniformities to transfer to a substrate when processed in the chamber;

wherein the first, second and third plurality of slots are arranged and extend out radially from a center of the Faraday shield and each slot is defined from a chevron groove, and the Faraday shield is electrically grounded.

7. The Faraday shield of claim 6 , wherein the chevron shaped groove does not include a line of sight between respective sides of the Faraday shield.

8. The Faraday shield of claim 6 , wherein the circular plate structure is made from stainless steel, hastalloy or titanium.

9. The Faraday shield of claim 6 , wherein the circular plate structure is passivated or coated with one of Y2O3, or CeO2, or TiN.

10. The Faraday shield of claim 6 , wherein the chevron grooves can be between 0.1 mm and 10 mm wide and between 0.1 mm and 5 mm deep.

Assignees

• Long Maolin
• Paterson Alex
• Marsh Ricky
• Wu Ying
• Drewery John
• Lam Res Corp

Inventors

• Long Maolin
• Paterson Alex
• Marsh Ricky
• Wu Ying
• Drewery John

Classifications

• H10P72/0421 Primary

  for drying etching · CPC title

• H01J37/32651 Primary

  Shields, e.g. dark space shields, Faraday shields · CPC title

• H05K9/00

  Screening of apparatus or components against electric or magnetic fields (devices for absorbing radiation from an antenna H01Q17/00) · CPC title

• H01L21/67069 Primary

  Electricity · mapped topic