Plasma processing apparatus and method of manufacturing semiconductor device using the same
US-12106945-B2 · Oct 1, 2024 · US
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Lu Siqing patents
Lu Siqing is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lu Siqing |
| Total patents | 14 |
| First publication | Dec 13, 2018 |
| Latest publication | Oct 1, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Electrostatic chuck and wafer etching device including the same
US-11728198-B2 · Aug 15, 2023 · US
Substrate processing apparatus
US-11538697-B2 · Dec 27, 2022 · US
Plasma processing apparatus and method of manufacturing semiconductor device using the same
US-2022076931-A1 · Mar 10, 2022 · US
Plasma processing apparatus
US-11244839-B2 · Feb 8, 2022 · US
Substrate processing apparatus
US-2021384012-A1 · Dec 9, 2021 · US
Substrate processing apparatus and semiconductor device manufacturing method using the same
US-2021151300-A1 · May 20, 2021 · US
Substrate processing apparatus
US-2021074558-A1 · Mar 11, 2021 · US
Plasma processing apparatus and method of manufacturing semiconductor device using the same
US-2020176230-A1 · Jun 4, 2020 · US
Electrostatic chuck and wafer etching device including the same
US-2020066565-A1 · Feb 27, 2020 · US
Recent patents
Latest publications not already listed above.
Plasma processing apparatus
US-2020066557-A1 · Feb 27, 2020 · US
Methods of manufacturing a semiconductor device
US-10529618-B2 · Jan 7, 2020 · US
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same
US-2019198296-A1 · Jun 27, 2019 · US
Methods of manufacturing a semiconductor device
US-2018358262-A1 · Dec 13, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 14 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0602 | 8 |
| H10P72/0434 | 7 |
| H10P72/0432 | 6 |
| H10P72/0421 | 6 |
| H01J2237/334 | 6 |