Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-11538697-B2
Application number	US-202017016881-A
Country	US
Kind code	B2
Filing date	Sep 10, 2020
Priority date	Sep 11, 2019
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

A substrate processing apparatus, including a processing chamber including a first internal space and a second internal space arranged in a vertical direction, the first internal space being configured to receive process gas to generate plasma; an induction electrode configured to divide the processing chamber, and having a plurality of through-holes arranged to connect the first internal space and the second internal space, wherein the plurality of through-holes are configured to induce an ion beam extracted from ions included in the plasma generated in the first internal space; a radical supply located in the second internal space, and including a reservoir configured to receive chemical liquid in which an object to be processed is immersed, and a lower electrode configured to apply nanopulses to the reservoir to generate radicals from the chemical liquid; and a chemical liquid supply configured to supply the chemical liquid to the reservoir.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a processing chamber including a first internal space and a second internal space arranged in a vertical direction with respect to the first internal space, wherein the first internal space is configured to receive process gas to generate plasma;
an induction electrode configured to divide the processing chamber into the first internal space and the second internal space, and having a plurality of through-holes arranged to connect the first internal space and the second internal space, wherein the plurality of through-holes are configured to induce an ion beam extracted from ions included in the plasma generated in the first internal space;
a radical supply located in the second internal space, and including a reservoir configured to receive chemical liquid in which an object to be processed is immersed, and a lower electrode, configured to apply nanopulses to the reservoir to generate radicals from the chemical liquid; and
a chemical liquid supply configured to supply the chemical liquid to the reservoir.

2. The substrate processing apparatus according to claim 1 , wherein the object comprises:
a semiconductor substrate;
a metal layer disposed on the semiconductor substrate; and
a mask disposed on the metal layer and having at least one opening, and
wherein the metal layer is exposed through the at least one opening such that the radicals etch the metal layer.

3. The substrate processing apparatus according to claim 2 , wherein the induction electrode comprises a grid configured to induce the ion beam from the plasma and to impart etching directivity for the radicals to perform an anisotropic etching reaction in an extraction direction of the ion beam.

4. The substrate processing apparatus according to claim 1 , wherein the radicals perform an anisotropic etching reaction in an extraction direction of the ion beam.

5. The substrate processing apparatus according to claim 1 , wherein the chemical liquid comprises at least one of deionized (DI) water, a CuCl 2 solution, an FeCl 3 solution, and an HF solution.

6. The substrate, processing apparatus according to claim 1 , wherein the process gas comprises an HCl gas, and
the radicals are OH radicals.

7. The substrate processing apparatus according to claim 1 , wherein the radical supply further comprises a heater configured to heat the chemical liquid, disposed in a lower portion of the reservoir.

8. The substrate processing apparatus according to claim 1 , wherein a first direct current power having a first polarity is applied to the induction electrode, and
wherein a second direct current power having a second polarity different from the first polarity is applied to the radical supply.

9. The substrate processing apparatus according to claim 1 , wherein the chemical liquid supply is configured to supply the chemical liquid to the reservoir, and to rotate to deviate from an extraction direction of the ion beam.

10. The substrate processing apparatus according to claim 1 , further comprising a drainage passage disposed in the radical supply, and configured to discharge the chemical liquid included in the reservoir.

11. A substrate processing apparatus comprising:
a processing chamber including a first internal space and a second internal space disposed below the first internal space, wherein the first internal space is configured to generate plasma;
an ion beam supply including an induction electrode disposed to divide the processing chamber into the first internal space and the second internal space, wherein the induction electrode includes a plurality of through-holes configured to induce an ion beam extracted from the plasma to irradiate the second internal space; and
a radical supply including a reservoir disposed in the second internal space and configured to receive chemical liquid, and a lower electrode configured to apply nanopulses to the reservoir to convert the chemical liquid into an in-liquid plasma state.

12. The substrate processing apparatus according to claim 11 , wherein the radical supply comprises:
a chuck located in the processing chamber, wherein the reservoir is disposed on an upper surface the chuck; and
a pulse supply unit configured to apply the nanopulses to the chuck, and
wherein the nanopulses have a period of 0.01 kHz to 100 kHz.

13. A substrate processing apparatus comprising:
a plasma generator configured to generate plasma in a processing chamber;
an ion beam supply configured to extract an ion beam from the plasma in the processing chamber; and
a radical supply configured to:
apply nanopulses to a chemical liquid in which an object is immersed to convert the chemical liquid into an in-liquid plasma state containing ions and radicals,
position a reservoir configured to receive the chemical liquid to face the ion beam supply, and
impart an etching directivity for the radicals to perform an anisotropic etching reaction of the object in as extraction direction of the ion beam.

14. The substrate processing apparatus according to claim 13 , wherein the ion beam supply comprises:
a grid configured to induce the ion beam from the plasma; and
a direct current power supply configured to apply direct current power to the grid.

15. The substrate processing apparatus according to claim 14 , wherein the grid comprises a plurality of grids including a first grid and a second grid,
wherein the first grid is disposed to face the second grid in the extraction direction.

16. The substrate processing apparatus according to claim 14 , wherein the grid comprises at least one of tungsten, aluminum, copper, molybdenum, stainless steel, and carbon.

17. The substrate processing apparatus according to claim 13 , wherein the radical supply comprises:
a chuck located in the processing chamber, wherein the reservoir is disposed on an upper surface of the chuck; and
a pulse supply unit configured to apply the nanopulses to the chuck.

18. The substrate, processing apparatus according to claim 13 , wherein the nanopulses have a period of 0.01 kHz to 100 kHz.

19. The substrate processing apparatus according to claim 13 , wherein the object comprises:
a semiconductor substrate;
a metal layer disposed on the semiconductor substrate; and
a mask disposed on the metal layer and having at least one opening,
wherein the metal layer is exposed through the at least one opening such that the radicals etch the metal layer.

20. The substrate processing apparatus according to claim 19 ,
wherein the metal layer comprises a metal material including copper,
wherein the ion beam comprises chlorine ions (Cl−),
wherein the chemical liquid is deionized (DI) water, and
wherein the radicals are OH radicals.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Nam Sang Ki
• Lee Jang-Yeob
• Kim Sungyeol
• KIM SungHyup
• Park Soonam
• Lu Siqing

Classifications

• H10P50/71

  using masks for conductive or resistive materials · CPC title

• H10P72/0426 Primary

  with the semiconductor substrates being dipped in baths or vessels · CPC title

• H01J37/32174

  Circuits specially adapted for controlling the RF discharge · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• H01J37/32899

  Multiple chambers, e.g. cluster tools · CPC title