Charged particle beam device
US-11798780-B2 · Oct 24, 2023 · US
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Lee Chahn patents
Lee Chahn is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lee Chahn |
| Total patents | 20 |
| First publication | Jan 8, 2015 |
| Latest publication | Oct 24, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Charged Particle Beam Device
US-2022122804-A1 · Apr 21, 2022 · US
Charged particle beam device
US-11239052-B2 · Feb 1, 2022 · US
Charged particle ray device and cross-sectional shape estimation program
US-11133147-B2 · Sep 28, 2021 · US
Charged Particle Beam Device
US-2020312615-A1 · Oct 1, 2020 · US
Charged particle ray device and cross-sectional shape estimation program
US-2020294756-A1 · Sep 17, 2020 · US
Charged particle beam device
US-10720306-B2 · Jul 21, 2020 · US
Charged particle beam device
US-2019180979-A1 · Jun 13, 2019 · US
Charged particle beam device and pattern measurement device
US-10290464-B2 · May 14, 2019 · US
Charged Particle Beam Device
US-2019103250-A1 · Apr 4, 2019 · US
Recent patents
Latest publications not already listed above.
Charged particle beam device
US-10249474-B2 · Apr 2, 2019 · US
Charged Particle Beam Device and Pattern Measurement Device
US-2018182595-A1 · Jun 28, 2018 · US
Charged particle beam device
US-9786468-B2 · Oct 10, 2017 · US
Charged Particle Beam Device
US-2017278671-A1 · Sep 28, 2017 · US
Charged particle beam device
US-9697987-B2 · Jul 4, 2017 · US
Scanning electron microscope
US-9472376-B2 · Oct 18, 2016 · US
Charged Particle Beam Device
US-2016240348-A1 · Aug 18, 2016 · US
Electron beam irradiation method and scanning electronic microscope
US-9257259-B2 · Feb 9, 2016 · US
Charged Particle Beam Device
US-2015357154-A1 · Dec 10, 2015 · US
Scanning electron microscope
US-2015008322-A1 · Jan 8, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Hitachi High Tech Corp | 20 |
| Kobayashi Kinya | 1 |
| Yokosuka Toshiyuki | 1 |
| Lee Chahn | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/28 | 20 |
| H01J2237/2817 | 18 |
| H01J37/22 | 14 |
| H01J37/147 | 13 |
| H01J2237/2806 | 12 |