Charged particle beam device

Patent metadata

Field	Value
Publication number	US-11239052-B2
Application number	US-202016900176-A
Country	US
Kind code	B2
Filing date	Jun 12, 2020
Priority date	Sep 26, 2013
Publication date	Feb 1, 2022
Grant date	Feb 1, 2022

Abstract

The scanning charged particle beam microscope according to the present application is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.

First claim

The invention claimed is:

1. A charged particle beam device for generating an image of a sample, comprising:
a charged particle source for generating a charged particle beam;
a deflector that scans the sample with the charged particle beam emitted from the charged particle source;
a detector that detects a charged particle obtained upon irradiation of the sample with the charged particle beam;
a computer system that processes an output of the detector and controls the deflector; and
a graphical user interface that displays a setting field for setting a condition of beam irradiation, and also displays a display field for displaying at least one of layout data and the image generated based on the output of the detector,
wherein:
the graphical user interface is configured to allow a plurality of areas to be set on at least one of the layout data and the image, and
the computer system controls the deflector so as to execute a beam scan based on the condition that has been set on the graphical user interface.

2. A charged particle beam device for generating an image of a sample, comprising:
a charged particle source for generating a charged particle beam;
a deflector that scans the sample with the charged particle beam emitted from the charged particle source;
a detector that detects a charged particle obtained upon irradiation of the sample with the charged particle beam;
one or more computer systems that controls the deflector and generates the image of the sample based on an output of the detector; and
a graphical user interface that displays a parameter space and allows a user to select an operation parameter of the charged particle beam device,
wherein:
the parameter space includes a dimension, and
the graphical user interface is configured to display an inside of the parameter space with the dimension in an identifiable manner in accordance with a signal of the image when the sample is scanned with the charged particle beam.

3. A charged particle beam device for generating an image of a sample, comprising:
a charged particle source for generating a charged particle beam;
a deflector that scans the sample with the charged particle beam emitted from the charged particle source;
a detector that detects a charged particle obtained upon irradiation of the sample with the charged particle beam;
one or more computer systems that controls the deflector and generates the image of the sample based on an output of the detector; and
a graphical user interface that displays a setting field for setting a beam irradiation of the deflector, and also displays a display field for displaying at least one of layout data or the image generated based on the output of the detector,
wherein:
the graphical user interface is configured to allow a plurality of areas to be set on at least one of the layout data or the image, and
the one or more computer systems controls the deflector based on a condition that has been set on the graphical user interface.

Assignees

• Hitachi High Tech Corp

Inventors

• Yokosuka Toshiyuki
• Lee Chahn
• Kazumi Hideyuki
• Kawano Hajime
• HOQUE Shahedul
• Shimizu Kumiko
• Takahashi Hiroyuki

Classifications

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2803

  characterised by the imaging method · CPC title

• H01J37/147

  Arrangements for directing or deflecting the discharge along a desired path ({H01J37/045 take precedence;} lenses H01J37/10) · CPC title

• H01J2237/3045

  Deflection calibration · CPC title

• H01J2237/2817

  Pattern inspection · CPC title