Charged Particle Beam Device

Patent metadata

Field	Value
Publication number	US-2019103250-A1
Application number	US-201816136534-A
Country	US
Kind code	A1
Filing date	Sep 20, 2018
Priority date	Sep 29, 2017
Publication date	Apr 4, 2019
Grant date	—

Abstract

There is proposed a charged particle beam device that generates a first signal waveform on the basis of scanning, the number of scanning lines of which is one or more, the scanning intersecting an edge of a pattern on a sample, generates a second signal waveform for a first area that is wider than the one scanning line on the basis of scanning, the number of scanning lines of which is larger than that of scanning for generating the first signal waveform, then determines a deviation between the generated first and second signal waveforms, and thereby determines, from the deviation, correction data used at the time of dimensional measurement.

First claim

What is claimed is:

1 . A charged particle beam device comprising: a scanning deflector that scans a charged particle beam emitted from a charged particle source; a detector that detects a charged particle obtained on the basis of scanning of the charged particle beam applied to a sample; a computing device that generates a signal waveform on the basis of an output of the detector, and computes pattern dimensions of a pattern formed on the sample by using the signal waveform; and a control device that controls the scanning deflector,
wherein when the control device controls the scanning deflector to perform scanning, the number of scanning lines of which being one or more, for a first region intersecting an edge of the pattern on the sample, the computing device generates a first signal waveform on the basis of the charged particle detected by the detector, when the control device controls the scanning deflector to perform scanning, the number of scanning lines of which being larger than that at the time of scanning the first region, for a first area that includes the first region, and that is wider than the first region, the computing device generates a second signal waveform on the basis of the charged particle detected by the detector, and the control device determines a deviation between the generated first and second signal waveforms.

2 . The charged particle beam device according to claim 1 , wherein
when the control device controls the scanning deflector to scan the charged particle beam in a first direction, the computing device generates the first signal waveform on the basis of the charged particle detected by the detector, and when the control device controls the scanning deflector to scan the charged particle beam in a second direction that differs from the first direction, the computing device generates a different first signal waveform on the basis of the charged particle detected by the detector.

3 . The charged particle beam device according to claim 1 , wherein
the computing device generates the first signal waveform for a plurality of different positions in the first area.

4 . The charged particle beam device according to claim 3 , wherein
the computing device determines a deviation between the first signal waveform and the second signal waveform at the plurality of positions.

5 . The charged particle beam device according to claim 4 , wherein
the computing device generates correction data used to correct a deviation in an irradiation position of the charged particle beam on the basis of the plurality of deviations.

6 . The charged particle beam device according to claim 5 , wherein
when the control device controls the scanning deflector to scan the charged particle beam in the first area, the computing device measures dimensions of a pattern included in the first area on the basis of the charged particle detected by the detector, and corrects a result of the measurement by using a correction table or a correction equation.

7 . The charged particle beam device according to claim 5 , wherein
the control device controls the scanning deflector to cause the charged particle beam to be irradiated at a beam irradiation position corrected by the correction table or the correction equation.

8 . The charged particle beam device according to claim 1 , further comprising a display device that displays an image of the first area on the basis of the detection of a charged particle obtained by beam scanning for the first area,
wherein the computing device displays the image of the first area, and a dimension value of the pattern in the first area, the dimension value having been corrected according to the deviation between the first signal waveform and the second signal waveform.

9 . A storage medium for storing a computer program that causes a computer to measure dimensions of a pattern to be measured on the basis of a measurement signal waveform obtained by a charged particle beam device, and that can be read by the computer,
the program causing the computer to: obtain a plurality of first signal waveforms obtained by performing scanning, the number of scanning lines of which is one or more, at a plurality of positions on a sample on which the pattern is formed, and image data obtained by beam scanning for an area that includes the plurality of positions; determine deviations of respective obtaining positions of the first signal waveforms at the plurality of positions from respective positions corresponding to obtaining positions of the first signal waveforms on the image data by comparing the first signal waveforms with second signal waveform data extracted from the image data; and generate, from the deviations at the plurality of positions, measurement-value correction data that uses the measurement signal waveforms.

Assignees

• Hitachi High Tech Corp

Inventors

• Yokosuka Toshiyuki
• Lee Chahn
• Kazumi Hideyuki
• Kawano Hajime

Classifications

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/265

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title

• H01J2237/1536

  Image distortions due to scanning · CPC title

• H01J2237/226

  Image reconstruction · CPC title

• H01J2237/24578

  Spatial variables, e.g. position, distance · CPC title