Charged Particle Beam Device

Patent metadata

Field	Value
Publication number	US-2016240348-A1
Application number	US-201415023936-A
Country	US
Kind code	A1
Filing date	Jun 11, 2014
Priority date	Sep 26, 2013
Publication date	Aug 18, 2016
Grant date	—

Abstract

The scanning charged particle beam microscope according to the present invention is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.

First claim

1 . A charged particle beam device, comprising:
a charged particle source; a deflector which scans a sample with a charged particle beam emitted from the charged particle source; an image memory which stores signals obtained by scan of the charged particle beam for the sample; and a control device which controls the deflector, wherein the control device controls the deflector so that scan of the charged particle beam between individual pixels is performed faster compared with when the charged particle beam irradiates a position on the sample corresponding to each pixel.

2 . The charged particle beam device according to claim 1 , wherein the control device determines a scan speed of the charged particle beam, on the basis of the signals obtained by signals obtained at different scan speeds.

3 . The charged particle beam device according to claim 2 , wherein the control device selects a scan speed where a predetermined ROI of an image formed by the signals satisfies a predetermined condition.

4 . The charged particle beam device according to claim 3 , wherein the control device selects a scan speed where brightness information in the ROI or contrast of the ROI and other portion and CNR of the ROI and other portion and a shrinkage amount of the ROI become predetermined conditions.

5 . The charged particle beam device according to claim 2 , wherein the control device selects the scan speed and an irradiation point interval where a predetermined ROI of an image formed by the signals satisfies a predetermined condition, from combinations of the different scan speeds and different irradiation point intervals.

6 . The charged particle beam device according to claim 5 , wherein the control device displays an image evaluation result for each combination of the scan speed and the irradiation point interval on a display device in a map shape.

7 . The charged particle beam device according to claim 1 , wherein the control device scans only pixels corresponding to an ROI in a field of view designated previously by an operator and forms an SEM image of a predetermined pixel number with pixels other than the ROI.

8 . A charged particle beam device, comprising:
a charged particle source; a deflector which scans a sample with a charged particle beam emitted from the charged particle source; an image memory which stores signals obtained by scan of the charged particle beam for the sample; and a control device which controls the deflector, wherein, when at least one of a scan speed and an irradiation point interval at the time of scan of the charged particle beam is set to at least two states, the control device evaluates signals obtained in each state and selects at least one of the scan speed and the irradiation point interval where an evaluation result satisfies a predetermined condition.

9 . The charged particle beam device according to claim 8 , wherein the control device selects a scan condition where a mean brightness or a contrast ratio of an ROI of an image obtained by scan of the charged particle beam is maximized.

10 . The charged particle beam device according to claim 8 , wherein, when the scan speed and the irradiation point interval are repetitively changed, the control device changes an X-scan waveform and/or a Y-scan waveform arbitrarily.

11 . The charged particle beam device according to claim 8 , further comprising:
an input device which display a map in which the scan speed is set to one axis and the irradiation point interval is set to the other axis, wherein the scan speed and the irradiation point interval are set on the basis of setting by the map.

Assignees

• Hitachi High Tech Corp

Inventors

• Yokosuka Toshiyuki
• Lee Chahn
• Kazumi Hideyuki
• Kawano Hajime
• HOQUE Shahedul
• Shimizu Kumiko
• Takahashi Hiroyuki

Classifications

• H01J2237/2806

  Secondary charged particle · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2817

  Pattern inspection · CPC title

• H01J2237/2803

  characterised by the imaging method · CPC title

• H01J2237/3045

  Deflection calibration · CPC title