Secondary charged particle imaging system
US-11094501-B2 · Aug 17, 2021 · US
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Lanio Stefan patents
Lanio Stefan is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lanio Stefan |
| Total patents | 14 |
| First publication | Feb 4, 2016 |
| Latest publication | Aug 17, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Secondary charged particle imaging system
US-2021151284-A1 · May 20, 2021 · US
Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
US-10991544-B2 · Apr 27, 2021 · US
Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
US-2020381208-A1 · Dec 3, 2020 · US
Simplified particle emitter and method of operating thereof
US-10699867-B2 · Jun 30, 2020 · US
Method of operating a charged particle beam specimen inspection system
US-10522327-B2 · Dec 31, 2019 · US
On-axis illumination and alignment for charge control during charged particle beam inspection
US-10168614-B1 · Jan 1, 2019 · US
On-axis illumination and alignment for charge control during charged particle beam inspection
US-2018364564-A1 · Dec 20, 2018 · US
System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics
US-10103004-B2 · Oct 16, 2018 · US
Simplified particle emitter and method of operating thereof
US-2018254165-A1 · Sep 6, 2018 · US
Recent patents
Latest publications not already listed above.
Charged particle beam specimen inspection system and method for operation thereof
US-10056228-B2 · Aug 21, 2018 · US
System for imaging a secondary charged particle beam with adaptive secondary charged particle optics
US-9953805-B2 · Apr 24, 2018 · US
Scanning charged particle beam device having an aberration correction aperture and method of operating thereof
US-2016189916-A1 · Jun 30, 2016 · US
Charged particle beam specimen inspection system and method for operation thereof
US-2016035537-A1 · Feb 4, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 10 |
| Applied Materials Israel Ltd | 7 |
| Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mhh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/28 | 8 |
| H01J37/026 | 5 |
| H01J37/222 | 4 |
| H01J37/12 | 4 |
| H01J37/145 | 4 |