Scanning charged particle beam device having an aberration correction aperture and method of operating thereof

Patent metadata

Field	Value
Publication number	US-2016189916-A1
Application number	US-201514972651-A
Country	US
Kind code	A1
Filing date	Dec 17, 2015
Priority date	Dec 17, 2014
Publication date	Jun 30, 2016
Grant date	—

Abstract

A scanning charged particle beam apparatus is described. The scanning charged particle beam apparatus includes a charged particle beam source configured for generating a primary charged particle beam; an objective lens configured for forming a probe on a specimen; a scanning deflection assembly configured for scanning the probe over a surface of the specimen; and an aberration correction aperture, wherein the aberration correction aperture includes an aperture body having a transparent aperture portion configured for having the primary charged particle beam pass through the transparent aperture portion; and a membrane portion including a solid material, wherein the membrane portion is provided at the transparent aperture portion and wherein the membrane portion is configured for having the primary charged particle beam pass through the solid material, wherein the membrane portion has a varying thickness.

First claim

1 . A scanning charged particle beam apparatus, comprising:
a charged particle beam source configured for generating a primary charged particle beam; an objective lens configured for forming a probe on a specimen, wherein the objective lens includes a decelerating electrostatic lens component; a scanning deflection assembly configured for scanning the probe over a surface of the specimen; and an aberration correction aperture, comprising: an aperture body having a transparent aperture portion configured for having the primary charged particle beam pass through the transparent aperture portion; and a membrane portion including a solid material, wherein the membrane portion is provided at the transparent aperture portion and wherein the membrane portion is configured for having the primary charged particle beam pass through the solid material, wherein the membrane portion has a varying thickness.

2 . The scanning charged particle beam apparatus according to claim 1 , wherein the membrane portion has a rotational symmetry around a center of the transparent aperture portion.

3 . The scanning charged particle beam apparatus according to claim 2 , wherein the membrane portion has varying thickness as a function of a radial position around the center.

4 . The scanning charged particle beam apparatus according to claim 1 , wherein the aberration correction aperture is a beam limiting aperture and the transparent aperture portion in the aperture body provides a portion of the primary charged particle beam, which is used for forming of the probe.

5 . The scanning charged particle beam apparatus according to claim 4 , wherein the aperture body further comprises:
a beam blocking portion around the transparent aperture portion configured to block charged particles.

6 . The scanning charged particle beam apparatus according to claim 1 , wherein the varying thickness has a local maximum at the center of the membrane portion and wherein the varying thickness has at least partially a radial increase.

7 . The scanning charged particle beam apparatus according to claim 1 , wherein the varying thickness is configured to introduce a phase shift within the primary charged particle beam.

8 . The scanning charged particle beam apparatus according to claim 1 , wherein the membrane portion is integrally formed with the aperture body.

9 . The scanning charged particle beam apparatus according to claim 1 , wherein the membrane portion is attached to the aperture body, optionally to a foil of the aperture body provided at the transparent aperture portion of the aperture body.

10 . The scanning charged particle beam apparatus according to claim 1 , wherein the solid material has a membrane opening within the transparent aperture portion.

11 . The scanning charged particle beam apparatus according to claim 1 , wherein the aperture body has at least a further transparent aperture portion, wherein the further transparent aperture portion is configured for having a further primary charged particle beam passing through the further transparent aperture portion;
wherein the aberration correction aperture further comprises:
a further membrane portion including a further solid material, wherein the further membrane portion is provided at the further transparent aperture portions, and wherein the further membrane portion is configured for having the further primary charged particle beam passing through the further solid material,
wherein the further membrane portion has a further varying thickness.

12 . The scanning charged particle beam apparatus according to claim 11 , wherein the varying thickness has a first thickness distribution different from a second thickness distribution of the further varying thickness.

13 . The scanning charged particle beam apparatus according to claim 1 , further comprising:
a spray aperture, which is positioned downstream along the primary charged particle beam of the aberration correction aperture, wherein the spray aperture is configured for blocking charged particles scattered from the aberration correction aperture.

14 . The scanning charged particle beam apparatus according to claim 1 , further comprising:
monochromator configured for reducing an energy width of the primary charged particle beam.

15 . The scanning charged particle beam apparatus according to claim 1 , wherein the scanning charged particle beam apparatus further comprises an electrode arrangement for accelerating the primary charged particle beam to a column energy of 10 keV or above, e.g. 30 keV or above.

16 . The scanning charged particle beam apparatus according to claim 15 , wherein the aberration correction aperture is configured to be biased to a potential corresponding to the column energy.

17 . A scanning charged particle beam apparatus, comprising:
a charged particle beam source configured for generating a primary charged particle beam; an objective lens configured for forming a probe on a specimen; a scanning deflection assembly configured for scanning the probe over a surface of the specimen; and an aberration correction aperture, comprising:
an aperture body having a transparent aperture portion configured for having the primary charged particle beam pass through the transparent aperture portion; and
a membrane portion including a solid material, wherein the membrane portion is provided at the transparent aperture portion and wherein the membrane portion is configured for having the primary charged particle beam pass through the solid material, wherein the membrane portion has a varying thickness,
wherein the aberration correction aperture is a beam limiting aperture and the transparent aperture portion in the aperture body provides a portion of the primary charged particle beam, which is used for forming of the probe.

18 . A method of operating a scanning charged particle beam apparatus, comprising:
generating a primary charged particle beam; correcting aberrations of the primary charged particle beam with an aberration correction aperture, wherein at least a portion of the primary charged particle beam passes through a membrane portion of the aberration correction aperture for introducing a phase shift within the primary charged particle beam; and decelerating the primary charged particle beam by a factor of 5 or more before impingement on the specimen.

19 . The method according to claim 18 , further comprising:
focusing the primary charged particle beam on a specimen having a first spot size; changing a demagnification of the charged particle beam apparatus; switching between the membrane portion of the aberration correction aperture having a first thickness distribution and a further membrane portion having a second thickness distribution different from the first thickness distribution; and focusing the primary charged particle beam on the specimen having a second spot size different from the first spot size.

20 . The method according to claim 18 , further comprising:
delimiting an aperture angle of the primary charged particle beam with an aberration correction aperture.

Assignees

• Applied Materials Israel Ltd

Inventors

• FROSIEN JüRGEN
• Lanio Stefan
• Arie Ady
• Shiloh Roy
• Remez Roei

Classifications

• H01J37/1474 Primary

  Scanning means · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2614

  Holography or phase contrast, phase related imaging in general, e.g. phase plates · CPC title

• H01J2237/1534

  Aberrations · CPC title

• H01J37/153

  Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators · CPC title