Secondary charged particle imaging system

Patent metadata

Field	Value
Publication number	US-11094501-B2
Application number	US-201916688985-A
Country	US
Kind code	B2
Filing date	Nov 19, 2019
Priority date	Nov 19, 2019
Publication date	Aug 17, 2021
Grant date	Aug 17, 2021

Abstract

A secondary charged particle imaging system comprising: a backscattered electron detector module, wherein the backscattered electron detector module is rotatable between a first angular position and a second angular position about an axis.

First claim

The invention claimed is:

1. A secondary charged particle imaging system, comprising:
a backscattered electron detector module configured to collect and/or detect backscattered electrons of a signal charged particle beam, the backscattered electron detector module including a backscattered electron detector element; and
a secondary charged particle optics module configured to shape, focus, and/or defocus the signal charged particle beam;
wherein the backscattered electron detector module is arranged along an optical axis upstream of the secondary charged particle optics module, and
wherein the backscattered electron detector module is rotatable between a first angular position where the signal charged particle beam can pass the backscattered electron detector module and a second angular position where the backscattered electron detector element is aligned with the optical axis.

2. The secondary charged particle imaging system according to claim 1 , wherein the backscattered electron detector module comprises an aperture.

3. The secondary charged particle imaging system according to claim 2 , wherein the aperture is arranged on the optical axis of the signal charged particle beam in the first angular position.

4. The secondary charged particle imaging system according to claim 2 , wherein the aperture is arranged between a beam bender and the secondary charged particle optics module in the first angular position.

5. The secondary charged particle imaging system according to claim 2 , wherein the aperture is configured to allow the signal charged particle beam to pass through the aperture in the first angular position.

6. The secondary charged particle imaging system according to claim 1 , further comprising a beam bender.

7. The secondary charged particle imaging system according to claim 6 , wherein the backscattered electron detector element is arranged between the beam bender and the secondary charged particle optics module in the second angular position.

8. The secondary charged particle imaging system according to claim 1 , wherein the secondary charged particle imaging system is configured for detecting secondary electrons in the first angular position.

9. The secondary charged particle imaging system according to claim 1 , wherein the backscattered electron detector element is configured to collect backscattered electrons of the signal charged particle beam in the second angular position.

10. The secondary charged particle imaging system according to claim 1 , wherein the secondary charged particle imaging system is configured for detecting backscattered electron in the second angular position.

11. The secondary charged particle imaging system according to claim 1 , wherein the backscattered electron detector element is arranged at a point of smallest cross-section or adjacent to the point of smallest cross-section of the signal charged particle beam in the second angular position.

12. The secondary charged particle imaging system according to claim 1 , further comprising a backscattered electron detector actuator module.

13. The secondary charged particle imaging system according to claim 12 , wherein the backscattered electron detector actuator module comprises a first limit stop and a second limit stop.

14. The secondary charged particle imaging system according to claim 13 , wherein the backscattered electron detector module is at the first angular position at the first limit stop, and wherein the backscattered electron detector module is at the second angular position at the second limit stop.

15. The secondary charged particle imaging system according to claim 12 , wherein the backscattered electron detector actuator module is configured for rotating the backscattered electron detector module between the first angular position and the second angular position.

16. The secondary charged particle imaging system according to claim 1 , wherein the backscattered electron module comprises an arm, and wherein the arm comprises a hinge joint pin at an axis.

17. The secondary charged particle imaging system according to claim 1 , further comprising a flexible enclosure.

18. The secondary charged particle imaging system according to claim 17 , wherein the backscattered electron module comprises an arm having a hinge joint pin at an axis, and the flexible enclosure is hermetically coupled at a first end portion to the arm between the hinge joint pin and the backscattered electron detector element.

19. The secondary charged particle imaging system according to claim 17 , wherein the flexible enclosure is hermetically coupled at a second end portion to a housing.

20. The secondary charged particle imaging system according to claim 17 , wherein the flexible enclosure is a flexible hose or bellow.

21. The secondary charged particle imaging system according to claim 17 , wherein the flexible enclosure is configured to maintain the backscattered electron detector element in vacuum condition and a hinge joint of an arm in ambient condition.

22. The secondary charged particle imaging system according to claim 1 , wherein an angular separation of the first angular position and the second angular position is less than 10 degrees.

23. A charged particle beam device comprising the secondary charged particle imaging system according to claim 1 .

24. The charged particle beam device according to claim 23 , wherein the charged particle beam device is a multi-beam charged particle beam device.

25. A method of operating a secondary charged particle imaging system comprising:
receiving a signal charged particle beam at a backscattered electron detector module, wherein the backscattered electron detector module is in a first angular position; and
rotating the backscattered electron detector module between the first angular position and a second angular position about an axis, wherein in the second angular position a backscattered electron detector element of the backscattered electron detector module is aligned with the signal charged particle beam to detect backscattered electrons in the signal charged particle beam;
wherein in the first angular position, the signal charged particle beam passes the backscattered electron detector module to a secondary charged particle optics module, and in the second angular position, the signal charged particle beam does not pass the backscattered electron detector module to the secondary charged particle optics module.

Assignees

• Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh

Inventors

• Firnkes Matthias
• Lampersberger Florian
• Lanio Stefan

Classifications

• H01J2237/2448

  Secondary particle detectors · CPC title

• H01J2237/24475

  Scattered electron detectors · CPC title

• H01J2237/202

  Movement · CPC title

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/023 Primary

  Means for mechanically adjusting components not otherwise provided for · CPC title