Moveable edge rings for plasma processing systems
US-12562350-B2 · Feb 24, 2026 · US
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Kimball Christopher patents
Kimball Christopher is listed as an inventor on 30 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kimball Christopher |
| Total patents | 30 |
| First publication | Jun 25, 2015 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Polymeric coating for semiconductor processing chamber components
US-12548737-B2 · Feb 10, 2026 · US
Moveable edge rings for plasma processing systems
US-2026005001-A1 · Jan 1, 2026 · US
Multi-plate electrostatic chucks with ceramic baseplates
US-12451335-B2 · Oct 21, 2025 · US
Electrostatic chuck heater resistance measurement to approximate temperature
US-12444570-B2 · Oct 14, 2025 · US
Method for conditioning semiconductor processing chamber components
US-12129569-B2 · Oct 29, 2024 · US
Electrostatic chuck with ceramic monolithic body
US-11967517-B2 · Apr 23, 2024 · US
Polymeric coating for semiconductor processing chamber components
US-2024120180-A1 · Apr 11, 2024 · US
Multi-plate electrostatic chucks with ceramic baseplates
US-2024112893-A1 · Apr 4, 2024 · US
Electrostatically clamped edge ring
US-11935776-B2 · Mar 19, 2024 · US
Recent patents
Latest publications not already listed above.
Multi-plate electrostatic chucks with ceramic baseplates
US-11848177-B2 · Dec 19, 2023 · US
Moveable edge rings for plasma processing systems
US-2023369026-A1 · Nov 16, 2023 · US
Method for conditioning semiconductor processing chamber components
US-2023092570-A1 · Mar 23, 2023 · US
Edge ring systems for substrate processing systems
US-2022285136-A1 · Sep 8, 2022 · US
Moveable edge rings with reduced capacitance variation for substrate processing systems
US-2022270863-A1 · Aug 25, 2022 · US
Moveable edge rings with reduced capacitance variation for substrate processing systems
US-2022254612-A1 · Aug 11, 2022 · US
Electrostatic chuck heater resistance measurement to approximate temperature
US-2022172925-A1 · Jun 2, 2022 · US
Electrostatic chuck with ceramic monolithic body
US-2022148903-A1 · May 12, 2022 · US
Automated process module ring positioning and replacement
US-2022122878-A1 · Apr 21, 2022 · US
Electrostatically clamped edge ring
US-2021166965-A1 · Jun 3, 2021 · US
Electrostatically clamped edge ring
US-10923380-B2 · Feb 16, 2021 · US
Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode
US-10804129-B2 · Oct 13, 2020 · US
Multi-plate electrostatic chucks with ceramic baseplates
US-2019267218-A1 · Aug 29, 2019 · US
Electrostatic chuck assembly incorporating a gasket for distributing rf power to a ceramic embedded electrode
US-2018277412-A1 · Sep 27, 2018 · US
ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
US-10002782-B2 · Jun 19, 2018 · US
Electrostatically clamped edge ring
US-2018166312-A1 · Jun 14, 2018 · US
Electrostatically clamped edge ring
US-9922857-B1 · Mar 20, 2018 · US
Esc assembly including an electrically conductive gasket for uniform rf power delivery therethrough
US-2016111314-A1 · Apr 21, 2016 · US
Electrostatic chuck including declamping electrode and method of declamping
US-9101038-B2 · Aug 4, 2015 · US
Electrostatic chuck including declamping electrode and method of declamping
US-2015181683-A1 · Jun 25, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 30 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 19 |
| H01L21/6833 | 19 |
| H01J37/32082 | 16 |
| H01J37/32715 | 16 |
| H10P72/0434 | 16 |