Charged particle beam device and method for correcting astigmatism and numerical aperture
US-2026081098-A1 · Mar 19, 2026 · US
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Kemen Thomas patents
Kemen Thomas is listed as an inventor on 40 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kemen Thomas |
| Total patents | 40 |
| First publication | Jan 8, 2015 |
| Latest publication | Mar 19, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Aberration corrector and method of aligning aberration corrector
US-2022375713-A1 · Nov 24, 2022 · US
Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen
US-11495433-B1 · Nov 8, 2022 · US
Multi-beam charged particle system
US-11087948-B2 · Aug 10, 2021 · US
Multi-beam charged particle system
US-2020357600-A1 · Nov 12, 2020 · US
Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device
US-10784070-B2 · Sep 22, 2020 · US
Multi-beam charged particle system
US-10741355-B1 · Aug 11, 2020 · US
Multi-beam charged particle system
US-2020251301-A1 · Aug 6, 2020 · US
Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device
US-2020126751-A1 · Apr 23, 2020 · US
Particle beam system
US-10600613-B2 · Mar 24, 2020 · US
Recent patents
Latest publications not already listed above.
Charged particle beam system and method of operating the same
US-10541112-B2 · Jan 21, 2020 · US
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
US-10504681-B2 · Dec 10, 2019 · US
Charged particle inspection method and charged particle system
US-10354831-B2 · Jul 16, 2019 · US
Particle beam system
US-2019088440-A1 · Mar 21, 2019 · US
Charged particle beam system and method of operating the same
US-2019066974-A1 · Feb 28, 2019 · US
Particle beam system
US-10147582-B2 · Dec 4, 2018 · US
Charged particle beam system and method of operating the same
US-10121635-B2 · Nov 6, 2018 · US
Particle beam system and method for operating a particle optical unit
US-9991089-B2 · Jun 5, 2018 · US
Particle beam system and method for operating a particle optical unit
US-2018040454-A1 · Feb 8, 2018 · US
Particle beam system and method for operating a particle optical unit
US-9799485-B2 · Oct 24, 2017 · US
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
US-2017287674-A1 · Oct 5, 2017 · US
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
US-9673024-B2 · Jun 6, 2017 · US
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
US-9653254-B2 · May 16, 2017 · US
Particle beam system
US-2017133194-A1 · May 11, 2017 · US
Particle beam system
US-9552957-B2 · Jan 24, 2017 · US
Focusing a charged particle system
US-9530613-B2 · Dec 27, 2016 · US
Charged particle beam system and method of operating the same
US-2016247663-A1 · Aug 25, 2016 · US
Charged particle inspection method and charged particle system
US-2016240344-A1 · Aug 18, 2016 · US
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
US-9384938-B2 · Jul 5, 2016 · US
Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements
US-2016155603-A1 · Jun 2, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Microscopy Gmbh | 31 |
| Applied Materials Israel Ltd | 22 |
| Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 5 |
| Carl Zeiss Multisem Gmbh | 3 |
| Zeiss Carl Smt Gmbh | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/28 | 34 |
| H01J2237/0453 | 28 |
| H01J37/09 | 24 |
| H01J37/10 | 20 |
| H01J2237/2817 | 18 |