Charged particle beam system and method of operating the same

Patent metadata

Field	Value
Publication number	US-10121635-B2
Application number	US-201415026189-A
Country	US
Kind code	B2
Filing date	Sep 30, 2014
Priority date	Sep 30, 2013
Publication date	Nov 6, 2018
Grant date	Nov 6, 2018

Abstract

A method of operating a charged particle beam system, the method comprises extracting a particle beam from a source; performing a first accelerating of the particles of the beam; forming a plurality of particle beamlets from the beam after the performing of the first accelerating; performing a second accelerating of the particles of the beamlets; performing a first decelerating of the particles of the beamlets after the performing of the second accelerating; deflecting the beamlets in a direction oriented transverse to a direction of propagation of the particles of the beamlets after the performing of the first decelerating; performing a second decelerating of the particles of the beamlets after the deflecting of the beamlets; and allowing the particles of the beamlets to be incident on an object surface after the performing of the second decelerating.

First claim

The invention claimed is:

1. A method of operating a charged particle beam system, the method comprising:
extracting a particle beam from a source;
performing a first accelerating of at least some particles of the particle beam;
forming a plurality of particle beamlets from the particle beam downstream from the first accelerating;
performing a first accelerating of at least some particles of the particle beamlets downstream from the first accelerating of particles of the particle beam and downstream from the forming of the plurality of particle beamlets;
performing a first decelerating of at least some particles of the particle beamlets downstream from the first accelerating of the particles of the particle beamlets;
deflecting the particle beamlets in a direction oriented transverse to a direction of propagation of the particles of the particle beamlets downstream from the first decelerating; and
performing a second decelerating of at least some particles of the particle beamlets downstream from the deflecting of the particle beamlets,
wherein the particles of the particle beamlets are incident on an object surface downstream from the second decelerating.

2. The method of claim 1 , further comprising performing a first converging of the particle beam upstream from the deflecting of the particle beamlets;
wherein the first converging is performed upstream from the forming the plurality of particle beamlets.

3. The method of claim 2 , further comprising performing a second converging of the particle beamlets upstream from the deflecting the particle beamlets;
wherein the second converging is performed such that a bundle of the particle beamlets forms a crossover; and
wherein the crossover is formed downstream from the second accelerating and upstream from the second decelerating.

4. The method of claim 3 , further comprising performing a third accelerating of at least some particles of the particle beamlets upstream from the crossover;
wherein the third accelerating increases the kinetic energy of the particles an energy amount greater than 10 keV.

5. The method of claim 1 , wherein at least one of the first accelerating of the particles of the particle beam and the first accelerating of the particles of the particle beamlets increases a kinetic energy of the particles by more than a first energy amount;
wherein at least one of the first decelerating and the second decelerating decreases the kinetic energy of the particles by more than the first energy amount; and
wherein the first energy amount is greater than 10 keV.

6. The method of claim 1 , wherein forming the plurality of particle beamlets includes generating beamlet foci and imaging the beamlet foci onto the substrate surface.

7. A method of operating a charged particle beam system, the method comprising:
extracting a particle beam from a source;
performing a first accelerating of at least some particles of the particle beam;
forming a plurality of particle beamlets from the particle beam downstream from the first accelerating of the particles of the particle beam;
performing a first decelerating of at least some particles of the particle beamlets downstream from the forming of the plurality of particle beamlets;
performing a first accelerating of at least some particles of the particle beamlets downstream from the first decelerating of the particles of the particle beamlets;
deflecting the particle beamlets in a direction oriented transverse to a direction of propagation of the particles of the particle beamlets downstream from the first decelerating of the particles of the particle beamlets; and
performing a second decelerating of at least some particles of the particle beamlets downstream from the deflecting the particle beamlets,
wherein the particles of the particle beamlets are incident on an object surface after performing the second decelerating.

8. The method of claim 7 , further comprising performing a first converging of the particle beam upstream from the deflecting the particle beamlets;
wherein the first converging is performed upstream from the forming the plurality of particle beamlets.

9. The method of claim 8 , further comprising performing a second converging of the particle beamlets upstream from deflecting the particle beamlets;
wherein the second converging is performed such that a bundle of the particle beamlets forms a crossover; and
wherein the crossover is formed downstream from the second accelerating and upstream from the second decelerating.

10. The method of claim 9 , further comprising performing a third accelerating of at least some particles of the particle beamlets upstream from the crossover;
wherein the third accelerating increases the kinetic energy of the particles an energy amount greater than 10 keV.

11. The method of claim 7 , wherein at least one of the first accelerating and the second accelerating increases a kinetic energy of the particles by more than a first energy amount;
wherein at least one of the first decelerating and the second decelerating decreases the kinetic energy of the particles by more than the first energy amount; and
wherein the first energy amount is greater than 10 keV.

12. The method of claim 7 , wherein forming the plurality of particle beamlets includes generating beamlet foci and imaging the beamlet foci onto the substrate surface.

13. A method of operating a charged particle beam system, the method comprising:
extracting a particle beam from a source;
performing a first accelerating of at least some particles of the particle beam;
performing a second accelerating of the particles of the particle beam downstream the first accelerating;
performing a first decelerating of at least some particles of the particle beam downstream from the second accelerating;
forming a plurality of particle beamlets from the particle beam downstream from the first decelerating, and accelerating at least some particles of the particle beamlets downstream of said forming;
deflecting the particle beamlets in a direction oriented transverse to a direction of propagation of particles of the particle beamlets downstream from the forming of the plurality of particle beamlets: and
performing a first decelerating of at least some particles of the particle beamlets downstream from the deflecting the particle beamlets,
wherein the particles of the particle beamlets are incident on an object surface after performing the second decelerating.

14. The method of claim 13 , further comprising performing a first converging of the particle beam upstream from the deflecting the particle beamlets;
wherein the first converging is performed upstream from the forming the plurality of particle beamlets.

15. The method of claim 14 , further comprising performing a second converging of the particle beamlets upstream from deflecting the particle beamlets;
wherein the second converging is performed such that a bundle of the particle beamlets forms a crossover; and
wherein the crossover is formed downstream from the second accelerating and upstream from the second decelerating.

16. The method of claim 15 , further comprising performing a third accelerating of at least some particles of the particle beamlets upstream from the crossover;
wherein the third accelerating increases the kinetic energy of the particles an energy amount greater than 10 keV.

17. The method of claim 13 , wherein at least one of the first accelerating and the second accelerating increases a kinetic energy of the particles by more than a first energy amount;
wherein at l

Assignees

• Zeiss Carl Microscopy Gmbh
• Applied Materials Israel Ltd
• Applied Materials Israel Ltd

Inventors

• Schubert Stefan
• Kemen Thomas
• Knippelmeyer Rainer

Classifications

• H01J2237/047

  Changing particle velocity · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/1472

  Deflecting along given lines · CPC title