Particle beam system

Patent metadata

Field	Value
Publication number	US-9552957-B2
Application number	US-201514724432-A
Country	US
Kind code	B2
Filing date	May 28, 2015
Priority date	May 30, 2014
Publication date	Jan 24, 2017
Grant date	Jan 24, 2017

Abstract

Particle beam system comprising a particle source; a first multi-aperture plate with a multiplicity of openings downstream of which particle beams are formed; a second multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams; an aperture plate with an opening which is penetrated by all the particles which also penetrate the openings in the first and the second multi-aperture plate; a third multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams, and with a multiplicity of field generators which respectively provide a dipole field or quadrupole field for a beam; and a controller for feeding electric potentials to the multi-aperture plates and the aperture plate so that the second openings in the second multi-aperture plate respectively act as a lens on the particle beams and feed adjustable excitations to the field generators.

First claim

The invention claimed is:

1. A particle beam system, comprising:
a particle source configured to generate a first beam of charged particles;
a first multi-aperture plate having a multiplicity of first openings, the first multi-aperture plate being arranged so that a first portion of the charged particles in the first beam strike the first multi-aperture plate and a second portion of the charged particles in the first beam pass through the first openings to provide a plurality of second beams of charged particles downstream of the first multi-aperture plate, each second beam having a cross section defined by a cross section of a respective first opening through which the second beam passed;
a second multi-aperture plate having a multiplicity of second openings, the second multi-aperture plate being arranged so that each second beam passes through a respective second opening;
an aperture plate arranged at a distance from the second multi-aperture plate, the aperture plate having an opening configured so that each second beam passes through the opening in the aperture plate;
a third multi-aperture plate having a multiplicity of third openings, the third multi-aperture plate being arranged so that each second beam passes through a respective third opening;
a multiplicity of field generators supported by the third multi-aperture plate, each field generator being assigned to a respective third opening, each field generator being configured to provide a field which acts on the second beam passing through its respective third opening, each field comprising a field selected from the group consisting of a dipole field and a quadrupole field; and
a controller configured to provide a first electric potential to the aperture plate and a second electric potential to the second multi-aperture plate, the first and second electric potentials being configured so that the second openings act as a lens on the charged particles in the second beams, and the controller being configured to provide adjustable excitations to the field generators.

2. The particle beam system of claim 1 , wherein, for each field generator and excitations to be fed to the field generator, the field generator and the excitations are configured so that: an intensity of the field is adjustable in a circumferential direction around the respective third opening; and an orientation of the field adjustable in the circumferential direction around the respective third opening.

3. The particle beam system of claim 1 , wherein, for each second beam, a diameter of the second opening through which the second beam passes is at least 1.05 times larger than a diameter of the first opening through which the second beam passes.

4. The particle beam system of claim 3 , wherein, for each second beam, a diameter of the third opening through which the second beam passes is at least 1.05 times larger than the diameter of the first opening through which the second beam passes.

5. The particle beam system of claim 1 , wherein, for each second beam, a diameter of the second opening through which the second beam passes is at least 1.8 times larger than a diameter of the first opening through which the second beam passes.

6. The particle beam system of claim 1 , wherein, for each second beam, a diameter of the third opening through which the second beam passes is at least 1.05 times larger than a diameter of the first opening through which the second beam passes.

7. The particle beam system of claim 1 , wherein the third multi-aperture plate is upstream of the second multi-aperture plate along a path of the second beams.

8. The particle beam system of claim 7 , wherein the first multi-aperture plate is upstream of the third multi-aperture plate along the path of the second beams.

9. The particle beam system of claim 8 , wherein a distance between the first multi-aperture plate and the third multi-aperture plate along the path of the second beams is from 0.1 to 10.0 times a diameter of the openings of the first multi-aperture plate.

10. The particle beam system of claim 9 , wherein a distance between the third multi-aperture plate and the second multi-aperture plate along the path of the second beams is from 0.1 to 10.0 times the diameter of the openings of the first multi-aperture plate.

11. The particle beam system of claim 9 , wherein a distance between the third multi-aperture plate and the second multi-aperture plate along the path of the second beams is from 0.3 to 3.0 times the diameter of the openings of the first multi-aperture plate.

12. The particle beam system of claim 8 , wherein a distance between the first multi-aperture plate and the third multi-aperture plate along a path of the second beams is from 0.3 times to 3.0 times a diameter of the openings of the first multi-aperture plate.

13. The particle beam system of claim 7 , wherein the aperture plate is downstream of the second multi-aperture plate along the path of the second beams.

14. The particle beam system of claim 1 , wherein the second multi-aperture plate is downstream of the first multi-aperture plate along a path of the second beams.

15. The particle beam system of claim 14 , wherein the third multi-aperture plate is downstream of the first multi-aperture plate along the path of the second beams.

16. The particle beam system of claim 14 , wherein the aperture plate is upstream of the second multi-aperture plate along the path of the second beams.

17. The particle beam system of claim 1 , wherein each field generator comprises eight electrodes distributed in a circumferential direction around its respective third opening, and the adjustable excitations are adjustable voltages.

18. The particle beam system of claim 1 , wherein each field generator comprises at least eight coils distributed in a circumferential direction around its respective third opening, and the adjustable excitations are adjustable currents.

19. The particle beam system of claim 1 , further comprising an electronic circuit supported by the third multi-aperture plate or a carrier which supports the third multi-aperture plate, wherein:
the controller is configured to generate data representing excitations of the field generators and to transmit the data to the electronic circuit via a serial data link;
each one of the field generators is connected to the electronic circuit via at least eight feeders; and
the electronic circuit is configured so that, based on the data, the electronic circuit generates the excitations of each field generator and applies the excitations to the at least eight feeders by which the field generator is connected to the electronic circuit.

20. A particle beam system, comprising:
a particle source configured to generate a first beam of charged particles;
a first multi-aperture plate having a multiplicity of first openings, the first multi-aperture plate being arranged so that a first portion of the charged particles in the first beam strike the first multi-aperture plate and a second portion of the charged particles in the first beam pass through the first openings to provide a plurality of second beams of charged particles downstream of the first multi-aperture plate, each second beam having a cross section defined by a cross section of a respective first opening through which the second beam passed;
a second multi-aperture plate having a multiplicity of second openings, the second multi-aperture plate being arranged so that each second beam passes through a respective second opening;
an aperture plate arranged at a dista

Assignees

• Zeiss Carl Microscopy Gmbh

Inventors

• Zeidler Dirk
• Kemen Thomas
• Riedesel Christof
• Lenke Ralf

Classifications

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/1202

  Associated circuits · CPC title

• H01J2237/0453

  multiple apertures · CPC title

• H01J37/09 Primary

  Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title