Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device
US-2026096382-A1 · Apr 2, 2026 · US
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Ito Fuyuma patents
Ito Fuyuma is listed as an inventor on 28 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ito Fuyuma |
| Total patents | 28 |
| First publication | Mar 22, 2018 |
| Latest publication | Apr 2, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
US-12532515-B2 · Jan 20, 2026 · US
Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device
US-12512335-B2 · Dec 30, 2025 · US
Semiconductor manufacturing device and method of manufacturing semiconductor device
US-2025285890-A1 · Sep 11, 2025 · US
Semiconductor wafer and method of manufacturing semiconductor apparatus
US-12131966-B2 · Oct 29, 2024 · US
Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device
US-2024096659-A1 · Mar 21, 2024 · US
Substrate treatment apparatus and manufacturing method of semiconductor device
US-11784064-B2 · Oct 10, 2023 · US
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
US-2023207616-A1 · Jun 29, 2023 · US
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
US-11616120-B2 · Mar 28, 2023 · US
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device
US-2023072887-A1 · Mar 9, 2023 · US
Recent patents
Latest publications not already listed above.
Substrate treatment device, substrate treatment method, and semiconductor device manufacturing method
US-11342182-B2 · May 24, 2022 · US
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
US-2022085153-A1 · Mar 17, 2022 · US
Plasma treatment apparatus, semiconductor manufacturing apparatus, and manufacturing method of semiconductor device
US-2022013367-A1 · Jan 13, 2022 · US
Semiconductor wafer and method of manufacturing semiconductor apparatus
US-2021407867-A1 · Dec 30, 2021 · US
Substrate treatment apparatus and method of manufacturing semiconductor device
US-11171022-B2 · Nov 9, 2021 · US
Substrate treatment apparatus and manufacturing method of semiconductor device
US-2021090913-A1 · Mar 25, 2021 · US
Substrate treatment apparatus and manufacturing method of semiconductor device
US-10879087-B2 · Dec 29, 2020 · US
Substrate treatment apparatus, method of manufacturing semiconductor device and workpiece substrate
US-10804221-B2 · Oct 13, 2020 · US
Substrate treating method and semiconductor device manufacturing method
US-10720321-B2 · Jul 21, 2020 · US
Substrate treatment device, substrate treatment method, and semiconductor device manufacturing method
US-2020185221-A1 · Jun 11, 2020 · US
Substrate treatment apparatus, method of manufacturing semiconductor device and workpiece substrate
US-2020091092-A1 · Mar 19, 2020 · US
Substrate treating method and semiconductor device manufacturing method
US-2020075315-A1 · Mar 5, 2020 · US
Substrate treatment apparatus and method of manufacturing semiconductor device
US-2020066550-A1 · Feb 27, 2020 · US
Plasma treatment apparatus, semiconductor manufacturing apparatus, and manufacturing method of semiconductor device
US-2019035636-A1 · Jan 31, 2019 · US
Substrate treatment apparatus and substrate treatment method
US-2018265989-A1 · Sep 20, 2018 · US
Substrate treatment apparatus and manufacturing method of semiconductor device
US-2018269082-A1 · Sep 20, 2018 · US
Semiconductor device manufacture method
US-9991159-B2 · Jun 5, 2018 · US
Semiconductor device manufacturing method
US-2018082893-A1 · Mar 22, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Toshiba Memory Corp | 15 |
| Kioxia Corp | 13 |
| Toshiba Kk | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0424 | 11 |
| H10P50/642 | 10 |
| H10P50/667 | 9 |
| H10P50/283 | 9 |
| H10B43/27 | 8 |