Substrate processing apparatus and substrate processing method
US-12550659-B2 · Feb 10, 2026 · US
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Ihara Toru patents
Ihara Toru is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ihara Toru |
| Total patents | 9 |
| First publication | Oct 5, 2017 |
| Latest publication | Feb 10, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing method and substrate processing apparatus
US-2025336690-A1 · Oct 30, 2025 · US
Substrate processing method and substrate processing apparatus
US-12456632-B2 · Oct 28, 2025 · US
Substrate processing apparatus and substrate processing method
US-11594427-B2 · Feb 28, 2023 · US
Substrate processing method and substrate processing apparatus
US-2023022814-A1 · Jan 26, 2023 · US
Substrate processing apparatus and substrate processing method
US-2022130690-A1 · Apr 28, 2022 · US
Substrate processing apparatus and substrate processing method
US-2021159095-A1 · May 27, 2021 · US
Substrate processing apparatus and substrate processing method
US-10851468-B2 · Dec 1, 2020 · US
Substrate processing apparatus and substrate processing method
US-2017283977-A1 · Oct 5, 2017 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P70/80 | 7 |
| H10P72/0408 | 7 |
| H01L21/67034 | 7 |
| H10P72/0402 | 6 |
| H10P70/20 | 5 |