Inverted plasma source, and method
US-2025087457-A1 · Mar 13, 2025 · US
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Hill Gordon patents
Hill Gordon is listed as an inventor on 34 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hill Gordon |
| Total patents | 34 |
| First publication | Sep 15, 2015 |
| Latest publication | Mar 13, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and apparatus for plasma ignition in toroidal plasma sources
US-12207385-B2 · Jan 21, 2025 · US
Inverted plasma source
US-2024407075-A1 · Dec 5, 2024 · US
Method and apparatus for plasma generation
US-12159765-B2 · Dec 3, 2024 · US
Apparatus and method for current sensing using embedded electrodes
US-2024312772-A1 · Sep 19, 2024 · US
Method and apparatus for plasma ignition in toroidal plasma sources
US-2024284584-A1 · Aug 22, 2024 · US
Method and apparatus for plasma generation
US-2024079209-A1 · Mar 7, 2024 · US
Methods and systems for endpoint detection in foreline of chamber clean and foreline clean processes
US-2024063001-A1 · Feb 22, 2024 · US
Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation
US-11854839-B2 · Dec 26, 2023 · US
Endpoint detection of deposition cleaning in a pumping line and a processing chamber
US-11745229-B2 · Sep 5, 2023 · US
Recent patents
Latest publications not already listed above.
Method and apparatus for plasma generation
US-11664197-B2 · May 30, 2023 · US
Method and apparatus for plasma generation
US-2023036853-A1 · Feb 2, 2023 · US
Predictive diagnostics systems and methods using vacuum pressure control valves
US-11480457-B2 · Oct 25, 2022 · US
Method and apparatus for deposition cleaning in a pumping line
US-11367598-B2 · Jun 21, 2022 · US
Endpoint Detection of Deposition Cleaning in a Pumping Line and a Processing Chamber
US-2022048081-A1 · Feb 17, 2022 · US
Valve Apparatuses and Related Methods for Reactive Process Gas Isolation and Facilitating Purge During Isolation
US-2021327727-A1 · Oct 21, 2021 · US
Actively cooled vacuum isolation valve
US-11054058-B2 · Jul 6, 2021 · US
Method and apparatus for deposition cleaning in a pumping line
US-11024489-B2 · Jun 1, 2021 · US
Method and Apparatus for Deposition Cleaning in a Pumping Line
US-2021082672-A1 · Mar 18, 2021 · US
Method and apparatus for pulse gas delivery with isolation valves
US-10649471-B2 · May 12, 2020 · US
Predictive diagnostics systems and methods using vacuum pressure control valves
US-2020124457-A1 · Apr 23, 2020 · US
Method and Apparatus for Deposition Cleaning in a Pumping Line
US-2020075298-A1 · Mar 5, 2020 · US
Predictive diagnostics systems and methods using vacuum pressure control valves
US-10557736-B2 · Feb 11, 2020 · US
Method and apparatus for deposition cleaning in a pumping line
US-10535506-B2 · Jan 14, 2020 · US
Actively cooled vacuum isolation valve
US-2019271410-A1 · Sep 5, 2019 · US
Method And Apparatus For Pulse Gas Delivery With Isolation Valves
US-2019243392-A1 · Aug 8, 2019 · US
Method and apparatus for valve deposition cleaning and prevention by plasma discharge
US-10337105-B2 · Jul 2, 2019 · US
Radial sealing butterfly valve
US-9945486-B2 · Apr 17, 2018 · US
Predictive diagnostics systems and methods using vacuum pressure control valves
US-2017328756-A1 · Nov 16, 2017 · US
Actively cooled vacuum isolation valve
US-2017292633-A1 · Oct 12, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Mks Instr Inc | 34 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| F16K51/02 | 15 |
| H01J37/32862 | 14 |
| F16K3/06 | 13 |
| F16K1/22 | 11 |
| H01J37/32963 | 9 |