Inverted plasma source

Patent metadata

Field	Value
Publication number	US-2024407075-A1
Application number	US-202418631119-A
Country	US
Kind code	A1
Filing date	Apr 10, 2024
Priority date	Apr 10, 2023
Publication date	Dec 5, 2024
Grant date	—

Abstract

A plasma source, comprising a plasma source body, comprising: a plurality of magnetic cores, a plurality of primary windings capable of being energized, and a cooling structure, wherein one or more sections of the plasma source body comprising a dielectric material, and wherein, when the plurality of primary windings are energized, a plasma forms around an outer portion of the plasma source body.

First claim

What is claimed:

1 . A plasma source, comprising:
a plasma source body, comprising:
a plurality of magnetic cores;
a plurality of primary windings capable of being energized; and
a cooling structure;
wherein one or more sections of said plasma source body comprising a dielectric material, and
wherein, when said plurality of primary windings are energized, a plasma forms around an outer portion of said plasma source body.

2 . The plasma source of claim 1 , further comprising potting situated on said inner portion of said plasma source body.

3 . The plasma source of claim 1 , said plasma source body further comprising an electrode capable of forming a discharge for ignition.

4 . The plasma source of claim 1 , wherein said the plasma source body having a torus shape.

5 . The plasma source of claim 1 , wherein said the plasma source body having a cylindrical shape.

6 . The plasma source of claim 1 , wherein said cooling structure comprising water passages.

7 . The plasma source of claim 6 , wherein said water passages comprising a plurality of pipes capable of conducting heat after a temperature threshold of the plurality of pipes has been exceeded.

8 . The plasma source of claim 4 , wherein the plasma source comprising a torus shaped plasma source body having a diameter of less than 1 inch to approximately 4 inches, and a height of about 1.5 inches, and capable of operating at about 500-2000 W.

9 . The plasma source of claim 8 , the plasma source having a diameter of about 3.25 inches.

10 . The plasma source of claim 1 , wherein said plurality of magnetic cores are ferrite cores.

11 . The plasma source of claim 2 , wherein said plurality of magnetic cores being encased in a thermally conductive potting.

12 . The plasma source of claim 1 , wherein a ferrite core is coupled with a portion of the cooling structure, and the vessel is coupled with a second portion of the cooling structure.

13 . The plasma source of claim 1 , wherein input gas is injected into a plasma discharge region.

14 . A plasma source, comprising:
a plasma source body formed from at least one plasma source body member and at least one dielectric break, the plasma source body defining at least one plasma source body passage therein; at least one ferrite core positioned within the plasma source body passage; at least one primary winding traversing at least a portion of the plasma source body, the primary winding positioned proximate to the ferrite core, the primary winding in communication with at least one source RF energy, wherein the application of RF energy to the primary winding results in the formation of a plasma proximate to an outer surface of the plasma source body; and at least one thermal management structure positioned within the plasma source body passage proximate to the ferrite core, the thermal management structure in fluid communication with at least one fluid source via at least one thermal management system inlet on the plasma source body.

15 . The plasma source of claim 14 , said plasma source body further comprising at least one electrode positioned within the plasma source body, the electrode capable of forming a discharge for ignition of the plasma.

16 . The plasma source of claim 14 , wherein said the plasma source body has a torus shape.

17 . The plasma source of claim 14 , wherein said the plasma source body has a cylindrical shape.

18 . The plasma source of claim 14 , wherein the plasma source comprising a torus shaped plasma source body having a diameter of less than 1 inch to approximately 4 inches, and a height of about 1.5 inches, and capable of operating at about 500-2000 W.

19 . The plasma source of claim 14 , the at least one ferrite core is encased in a thermally conductive potting.

Assignees

• Mks Instr Inc

Inventors

• Hill Gordon
• Collins Ron

Classifications

• H05H1/2406

  using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes · CPC title

• H05H1/4652 Primary

  using inductive coupling means, e.g. coils · CPC title

• H05H2242/10

  Cooling arrangements · CPC title

• H01J37/32532

  Electrodes · CPC title

• H01J37/32174

  Circuits specially adapted for controlling the RF discharge · CPC title