Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation

Patent metadata

Field	Value
Publication number	US-11854839-B2
Application number	US-202016849871-A
Country	US
Kind code	B2
Filing date	Apr 15, 2020
Priority date	Apr 15, 2020
Publication date	Dec 26, 2023
Grant date	Dec 26, 2023

Abstract

An isolation valve assembly including a valve body having an inlet and an outlet. The isolation valve includes a seal plate disposed within an interior cavity of the valve body. The seal plate is movable between a first position allowing gas flow from the inlet to the outlet, and a second position preventing gas flow from the inlet to the outlet. The isolation valve includes a closure element disposed within the valve body. The closure element is configured to retain the seal plate stationary in the first position or the second position. The closure element includes a first sealing element positioned adjacent to a first surface of the seal plate. A working surface of the first sealing element is substantially obscured from the gas flow when the seal plate is stationary.

First claim

What is claimed is:

1. An isolation valve assembly for a semiconductor processing system, the isolation valve assembly comprising:
a valve body having an inlet and an outlet;
a seal plate disposed within an interior cavity of the valve body, the seal plate comprising:
a first portion including an opening and a second portion, the seal plate being movable between a first position allowing gas flow from the inlet to the outlet via the opening of the first portion, and a second position employing the second portion to prevent gas flow from the inlet to the outlet; and
at least one coolant channel for conducting a coolant through the seal plate for cooling the seal plate; and

an actuatable closure element disposed within the valve body, wherein the closure element is configured to (i) press against the seal plate to retain the seal plate stationary in the first position or the second position and (ii) release physical contact with the seal plate when the seal plate is moving between the first and second positions, the closure element comprising a first elastomer sealing element positioned adjacent to a first surface of the seal plate,
wherein a working surface of the first sealing element is substantially obscured from the gas flow when the seal plate is stationary.

2. The isolation valve assembly of claim 1 wherein the actuatable closure element is configured to use a compressive force to retain the seal plate stationary in the first position or the second position.

3. The isolation valve assembly of claim 1 wherein the first elastomer sealing element provides a seal substantially preventing gas flow between the actuatable closure element and the first surface of the seal plate when the seal plate is stationary.

4. The isolation valve assembly of claim 1 wherein the seal plate is movable between the first position and the second position in a linear motion.

5. The isolation valve assembly of claim 1 wherein a height of the isolation valve assembly is between about 1.5 to about 2 times a measured diameter of either of the inlet and the outlet.

6. The isolation valve assembly of claim 1 further comprising:
a first aperture formed in the valve body for receiving a purge gas into the interior cavity of the valve body; and
a second aperture formed in the valve body for removing one or more of the purge gas and a residual gas from the interior cavity of the valve body, wherein the second aperture is formed in the valve body at a position remote from the first aperture.

7. The isolation valve assembly of claim 6 wherein the seal plate further comprises a channel directing gas flow from the inlet to the interior cavity of the valve body when the seal plate is in the second position.

8. The isolation valve assembly of claim 1 further comprising a plurality of injection ports for injecting one or more chemical species into the gas flow when the seal plate is in the first position.

9. The isolation valve assembly of claim 8 wherein the plurality of injection ports are formed in the seal plate, in the valve body between the seal plate and the inlet, or in the valve body between the seal plate and the outlet.

10. The isolation valve assembly of claim 1 wherein the seal plate is movable between the first position and the second position about a pivot point in a rotational motion.

11. The isolation valve assembly of claim 10 wherein the seal plate further comprises at least one fluid channel in communication with a fluid inlet of the pivot point.

12. The isolation valve assembly of claim 1 wherein the actuatable closure element further comprises a second sealing element positioned adjacent to a second surface of the seal plate.

13. The isolation valve assembly of claim 12 wherein a working surface of the second sealing element is substantially obscured from the gas flow when the seal plate is stationary.

14. The isolation valve assembly of claim 12 wherein the second sealing element provides a seal substantially preventing gas flow between the actuatable closure element and the second surface of the seal plate when the seal plate is stationary.

Assignees

• Mks Instr Inc

Inventors

• Cowe Andrew B
• Hill Gordon

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0441 Primary

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H01L21/67017 Primary

  Electricity · mapped topic

• B08B5/00

  Cleaning by methods involving the use of air flow or gas flow (cleaning hollow articles by methods or apparatus specially adapted thereto B08B9/00) · CPC title