Predictive diagnostics systems and methods using vacuum pressure control valves

Patent metadata

Field	Value
Publication number	US-10557736-B2
Application number	US-201715581875-A
Country	US
Kind code	B2
Filing date	Apr 28, 2017
Priority date	May 10, 2016
Publication date	Feb 11, 2020
Grant date	Feb 11, 2020

Abstract

Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.

First claim

The invention claimed is:

1. A method for calibrating a valve in a vacuum system, comprising:
measuring conductance of the valve as a function of angular valve position;
determining a conductance map or function for the valve by comparing the measured valve conductance to a predefined metric of conductance versus angular valve position;
storing the conductance calibration map or function for use during operation of the valve, wherein a difference between the measured valve conductance and the predefined metric of conductance versus angular valve position is used in determining the conductance map or function;
during operation, receiving a set point angular valve position based on a desired conductance of the valve, and setting actual angular valve position of the valve based on the received set point angular valve position and the difference between the measured valve conductance and the predefined metric of conductance versus angular valve position;
determining an actual system conductance and determining a difference between the actual system conductance and a reference system conductance for the system; and
generating a diagnostic indication of a fault in the system, the diagnostic indication being based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system; wherein
if the actual angular valve position is relatively low and the actual system conductance is greater than the reference system conductance, in a low-conductance valve, the diagnostic indication is that a flapper seal of the low-conductance valve is worn.

2. The method of claim 1 , wherein the relatively low angular valve position is below 20 degrees.

3. A method for providing a diagnostic indication in a vacuum system using a valve, the method comprising:
receiving a set point angular valve position based on a desired conductance of the valve;
setting actual angular valve position of the valve based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position;
determining an actual system conductance;
determining a difference between the actual system conductance and a reference system conductance for the system; and
generating a diagnostic indication of a fault in the system, the diagnostic indication being based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system; wherein,
if the actual angular valve position is relatively low and the actual system conductance is greater than the reference system conductance, in a low-conductance valve, the diagnostic indication is that a flapper seal of the low-conductance valve is worn.

4. The method of claim 3 , wherein the relatively low angular valve position is below 20 degrees.

5. A method for calibrating a valve in a vacuum system, comprising:
measuring conductance of the valve as a function of angular valve position;
determining a conductance map or function for the valve by comparing the measured valve conductance to a predefined metric of conductance versus angular valve position; and
storing the conductance calibration map or function for use during operation of the valve wherein a difference between the measured valve conductance and the predefined metric of conductance versus angular valve position is used in determining the conductance map or function;
during operation, receiving a set point angular valve position based on a desired conductance of the valve; and setting actual angular valve position of the valve based on the received set point angular valve position and the difference between the measured valve conductance and the predefined metric of conductance versus angular valve position;
determining an actual system conductance and determining a difference between the actual system conductance and a reference system conductance for the system; and
generating a diagnostic indication of a fault in the system, the diagnostic indication being based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system; wherein
if the actual angular valve position is relatively low and the actual system conductance is less than the reference system conductance, in a non-sealing valve, the diagnostic indication is that deposition by-products have accumulated on at least one of a valve wall and a flapper of the valve.

6. The method of claim 5 , wherein the relatively low angular valve position is below 20 degrees.

7. A method for calibrating a valve in a vacuum system, comprising:
measuring conductance of the valve as a function of angular valve position;
determining a conductance map or function for the valve by comparing the measured valve conductance to a predefined metric of conductance versus angular valve position; and
storing the conductance calibration map or function for use during operation of the valve wherein a difference between the measured valve conductance and the predefined metric of conductance versus angular valve position is used in determining the conductance map or function;
during operation, receiving a set point angular valve position based on a desired conductance of the valve; and setting actual angular valve position of the valve based on the received set point angular valve position and the difference between the measured valve conductance and the predefined metric of conductance versus angular valve position;
determining an actual system conductance and determining a difference between the actual system conductance and a reference system conductance for the system; and
generating a diagnostic indication of a fault in the system, the diagnostic indication being based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system; wherein
if the actual angular valve position is relatively high and the actual system conductance is less than the reference system conductance, in a low-conductance valve, the diagnostic indication is at least one of an at least partial blockage in a conduit of the system and degradation of a pump in the system.

8. The method of claim 7 , wherein the relatively high angular valve position is greater than 50 degrees.

9. A method for calibrating a valve in a vacuum system, comprising:
measuring conductance of the valve as a function of angular valve position;
determining a conductance map or function for the valve by comparing the measured valve conductance to a predefined metric of conductance versus angular valve position; and
storing the conductance calibration map or function for use during operation of the valve wherein a difference between the measured valve conductance and the predefined metric of conductance versus angular valve position is used in determining the conductance map or function;
during operation, receiving a set point angular valve position based on a desired conductance of the valve; and setting actual angular valve position of the valve based on the received set point angular valve position and the difference between the measured valve conductance and the predefined metric of conductance versus angular valve position;
determining an actual system conductance and determining a difference between the actual system conductance and a reference system conductance for the system; and generating a diagnostic indication of a fault in the system, the diagnostic indication being based on the actual angular valve position of the va

Assignees

• Mks Instr Inc

Inventors

• Chamberlain David Brian
• Davidkovich Vladislav
• Benedict Scott
• Hill Gordon

Classifications

• F16K51/02

  specially adapted for high-vacuum installations · CPC title

• F16K37/0091

  by measuring fluid parameters · CPC title

• F16K37/0083 Primary

  by measuring valve parameters · CPC title

• G01N17/008

  Monitoring fouling · CPC title

• G01F9/001 Primary

  with electric, electro-mechanic or electronic means (G01F9/008 and G01F9/02 take precedence) · CPC title