Predictive diagnostics systems and methods using vacuum pressure control valves

Patent metadata

Field	Value
Publication number	US-11480457-B2
Application number	US-201916724844-A
Country	US
Kind code	B2
Filing date	Dec 23, 2019
Priority date	May 10, 2016
Publication date	Oct 25, 2022
Grant date	Oct 25, 2022

Abstract

Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.

First claim

The invention claimed is:

1. A method for calibrating a first valve in a vacuum system, comprising:
measuring conductance of a reference valve as a function of reference valve angular position to determine a desired reference curve of conductance versus angular valve position;
measuring conductance of the first valve as a function of angular valve position;
determining a conductance map or function for the first valve by comparing the measured conductance of the first valve as a function of angular valve position to the desired reference curve of conductance versus angular valve position;
storing the conductance calibration map or function and the desired reference curve for use during operation of the first valve; and
adjusting a reported position of the first valve such that the reported position of the first valve matches the position that the reference valve would have at a particular conductance value, for conductance values along the curve of conductance versus angular valve position of the reference valve.

2. The method of claim 1 , wherein a difference between the measured conductance of the first valve and the desired reference curve of conductance versus angular valve position is used in determining the conductance map or function.

3. The method of claim 2 , further comprising, during operation, receiving a set point angular valve position based on a desired conductance of the first valve; and setting actual angular valve position of the first valve based on the received set point angular valve position and the difference between the measured conductance of the first valve and the desired reference curve of conductance versus angular valve position.

4. The method of claim 3 , further comprising determining an actual system conductance and determining a difference between the actual system conductance and a reference system conductance for the system.

5. The method of claim 4 , further comprising generating a diagnostic indication of a fault in the system, the diagnostic indication being based on the actual angular valve position of the first valve and the difference between the actual system conductance and the reference system conductance for the system.

6. The method of claim 5 , wherein, if the actual angular valve position of the first valve is relatively low and the actual system conductance is greater than the reference system conductance, in a low-conductance valve, the diagnostic indication is that a flapper seal of the low-conductance valve is worn.

7. The method of claim 6 , wherein the relatively low angular valve position of the first valve is below 20 degrees.

8. The method of claim 5 , wherein, if the actual angular valve position of the first valve is relatively low and the actual system conductance is less than the reference system conductance, in a non-sealing valve, the diagnostic indication is that deposition by-products have accumulated on at least one of a valve wall and a flapper of the first valve.

9. The method of claim 8 , wherein the relatively low angular valve position of the first valve is below 20 degrees.

10. The method of claim 5 , wherein, if the actual angular valve position of the first valve is relatively high and the actual system conductance is less than the reference system conductance, in a low-conductance valve, the diagnostic indication is at least one of an at least partial blockage in a conduit of the system and degradation of a pump in the system.

11. The method of claim 10 , wherein the relatively high angular valve position of the first valve is greater than 50 degrees.

12. The method of claim 5 , wherein, if the actual angular valve position of the first valve is relatively high and the actual system conductance is less than the reference system conductance, in a non-sealing valve, the diagnostic indication is at least one of an at least partial blockage in a conduit of the system and degradation of a pump in the system.

13. The method of claim 12 , wherein the relatively high angular valve position of the first valve is greater than 50 degrees.

14. A method for providing a diagnostic indication in a vacuum system using a first valve, the method comprising:
measuring conductance of a reference valve as a function of reference valve angular position to determine a desired reference curve of conductance versus angular valve position;
measuring conductance of the first valve as a function of angular valve position;
determining a conductance map or function for the first valve by comparing the measured conductance of the first valve as a function of angular valve position to the desired reference curve of conductance versus angular valve position;
storing the conductance calibration map or function and the desired reference profile for use during operation of the first valve;
receiving a set point angular valve position based on a desired conductance of the first valve;
setting actual angular valve position of the first valve based on the received set point angular valve position and a difference between the measured conductance of the first valve and the desired reference profile of conductance versus angular valve position, said setting actual angular valve position of the first valve comprising adjusting a reported position of the first valve such that the reported position of the first valve matches the position that the reference valve would have at a particular conductance value, for conductance values along the curve of conductance versus angular valve position of the reference valve;
determining an actual system conductance;
determining a difference between the actual system conductance and a reference system conductance for the system; and
generating a diagnostic indication of a fault in the system, the diagnostic indication being based on the actual angular valve position of the first valve and the difference between the actual system conductance and the reference system conductance for the system.

15. The method of claim 14 , wherein, if the actual angular valve position of the first valve is relatively low and the actual system conductance is greater than the reference system conductance, in a low-conductance valve, the diagnostic indication is that a flapper seal of the first valve is worn.

16. The method of claim 15 , wherein the relatively low angular valve position of the first valve is below 20 degrees.

17. The method of claim 14 , wherein, if the actual angular valve position of the first valve is relatively low and the actual system conductance is less than the reference system conductance, in a non-sealing valve, the diagnostic indication is that deposition by-products have accumulated on at least one of a valve wall and a flapper of the first valve.

18. The method of claim 17 , wherein the relatively low angular valve position of the first valve is below 20 degrees.

19. The method of claim 14 , wherein, if the actual angular valve position of the first valve is relatively high and the actual system conductance is less than the reference system conductance, in a low-conductance valve, the diagnostic indication is at least one of an at least partial blockage in a conduit of the system and degradation of a pump in the system.

20. The method of claim 19 , wherein the relatively high angular valve position of the first valve is greater than 50 degrees.

21. The method of claim 14 , wherein, if the actual angular valve position of the first valve is relatively high and the actual system conductance is less than the reference sy

Assignees

• Mks Instr Inc

Inventors

• Chamberlain David Brian
• Davidkovich Vladislav
• Benedict Scott
• Hill Gordon

Classifications

• G01F9/001 Primary

  with electric, electro-mechanic or electronic means (G01F9/008 and G01F9/02 take precedence) · CPC title

• F16K37/0041 Primary

  for measuring valve parameters (F16K37/0033 takes precedence) · CPC title

• F16K37/0083 Primary

  by measuring valve parameters · CPC title

• F16K37/0091

  by measuring fluid parameters · CPC title

• F16K51/02

  specially adapted for high-vacuum installations · CPC title