Substrate cleaning device and substrate processing device
US-12532694-B2 · Jan 20, 2026 · US
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Eto Yohei patents
Eto Yohei is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Eto Yohei |
| Total patents | 12 |
| First publication | Sep 15, 2016 |
| Latest publication | Jan 20, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate cleaning device and substrate processing device
US-2022402003-A1 · Dec 22, 2022 · US
Carrier device, work processing apparatus, control method of carrier device and storage medium storing program
US-11380559-B2 · Jul 5, 2022 · US
Apparatus for cleaning substrate and substrate cleaning method
US-11094548-B2 · Aug 17, 2021 · US
Carrier device, work processing apparatus, control method of carrier device and storage medium storing program
US-2020328096-A1 · Oct 15, 2020 · US
Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program
US-10589398-B2 · Mar 17, 2020 · US
Substrate transfer hand
US-10475691-B2 · Nov 12, 2019 · US
Apparatus and method for regulating surface temperature of polishing pad
US-10414018-B2 · Sep 17, 2019 · US
Substrate cleaning device and substrate cleaning method
US-2019164769-A1 · May 30, 2019 · US
Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program
US-2018236631-A1 · Aug 23, 2018 · US
Recent patents
Latest publications not already listed above.
Apparatus and method for regulating surface temperature of polishing pad
US-2017239778-A1 · Aug 24, 2017 · US
Substrate transfer hand
US-2016264365-A1 · Sep 15, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Ebara Corp | 11 |
| Hirata Spinning | 2 |
| Ebara Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7602 | 4 |
| B25J11/0095 | 4 |
| H01L21/68707 | 4 |
| H10P72/7608 | 4 |
| H10P72/0414 | 4 |