Substrate transfer hand

Patent metadata

Field	Value
Publication number	US-2016264365-A1
Application number	US-201615063137-A
Country	US
Kind code	A1
Filing date	Mar 7, 2016
Priority date	Mar 10, 2015
Publication date	Sep 15, 2016
Grant date	—

Abstract

A substrate transfer hand is configured to sandwich a substrate between a plurality of receiving members and a gripping member and to fix the substrate by moving the gripping member with an actuator. The plurality of receiving members each have a flat plate-shaped support portion mounted on the main hand body, a substrate outer periphery holding portion supported on the support portion and configured to hold an outer periphery of the substrate, and a substrate lower surface holding portion supported on the support portion and configured to hold a lower surface of the substrate. The substrate outer periphery holding portion has a portion provided vertically from the support portion and configured to hold the substrate in contact with the outer periphery of the substrate. The substrate lower surface holding portion has a portion inclined from an outer peripheral side toward an inner side of the substrate to be held. The substrate outer periphery holding portion and the substrate lower surface holding portion are spaced from each other by a gap or a groove.

First claim

What is claimed is:

1 . A substrate transfer hand comprising:
a main hand body having a flat plate shape; a plurality of receiving members provided on the main hand body and configured to hold an edge of a substrate; and a gripping member movably provided with respect to the main hand body and configured to grip the edge of the substrate, the gripping member being moved by an actuator to sandwich the substrate between the receiving members and the gripping member and to fix the substrate; wherein the plurality of receiving members each have a flat plate-shaped support portion mounted on the main hand body, a substrate outer periphery holding portion supported on the support portion and configured to hold an outer periphery of the substrate, and a substrate lower surface holding portion supported on the support portion and configured to hold a lower surface of the substrate; the substrate outer periphery holding portion has a portion provided vertically from the support portion and configured to hold the substrate in contact with the outer periphery of the substrate; the substrate lower surface holding portion has a portion inclined from an outer peripheral side toward an inner side of the substrate to be held; and the substrate outer periphery holding portion and the substrate lower surface holding portion are spaced from each other by a gap or a groove.

2 . The substrate transfer hand according to claim 1 , wherein the portion of the substrate outer periphery holding portion configured to hold the substrate in contact with the outer periphery of the substrate comprises an circular-arc surface along the outer periphery of the substrate.

3 . The substrate transfer hand according to claim 1 , wherein the portion of the substrate outer periphery holding portion configured to hold the substrate in contact with the outer periphery of the substrate comprises a polygonal prism having a top line which is brought into contact with the outer periphery of the substrate or a columnar body having a curved surface.

4 . The substrate transfer hand according to claim 1 , wherein the substrate outer periphery holding portion comprises a plurality of substrate outer periphery holding portions disposed across the gap or the groove.

5 . The substrate transfer hand according to claim 1 , wherein the inclined portion of the substrate lower surface holding portion comprises an inclined surface.

6 . The substrate transfer hand according to claim 1 , wherein the inclined portion of the substrate lower surface holding portion comprises a polygonal prism having a top line which is brought into contact with the outer periphery of the substrate or a columnar body having a curved surface.

7 . The substrate transfer hand according to claim 1 , wherein the substrate outer periphery holding portion has an upper portion which is cut off to provide a thin edge-like upper end.

8 . A substrate transfer hand comprising:
a main hand body having a flat plate shape; a plurality of receiving members provided on the main hand body and configured to hold an edge of a substrate; and a gripping member movably provided with respect to the main hand body and configured to grip the edge of the substrate, the gripping member being moved by an actuator to sandwich the substrate between the receiving members and the gripping member and to fix the substrate; wherein the plurality of receiving members each have a flat plate-shaped support portion mounted on the main hand body, a substrate outer periphery holding portion supported on the support portion and configured to hold an outer periphery of the substrate, and a substrate lower surface holding portion supported on the support portion and configured to hold a lower surface of the substrate; and the gripping member has a portion configured to grip the substrate in contact with the outer periphery of the substrate, the portion configured to grip the substrate comprising a columnar body having a curved surface.

9 . The substrate transfer hand according to claim 8 , wherein the columnar body having the curved surface comprises at least a portion of a circular cylinder or at least a portion of an inverted truncated cone.

10 . The substrate transfer hand according to claim 8 , wherein the columnar body having the curved surface comprises an integral combination of a columnar body comprising at least a portion of a circular cylinder located at a lower side and a columnar body comprising at least a portion of an inverted truncated cone located at an upper side.

11 . The substrate transfer hand according to claim 8 , wherein the gripping member has an upper portion which is cut off to provide a thin edge-like upper end.

12 . A substrate transfer hand comprising:
a main hand body; a receiving member provided on the main hand body and configured to hold an edge of a substrate; and a gripping member movably provided with respect to the main hand body and configured to grip the edge of the substrate, the gripping member being moved by an actuator to sandwich the substrate between the receiving member and the gripping member and to fix the substrate; wherein the receiving member has a substrate outer periphery holding surface configured to hold an outer periphery of the substrate in contact with the outer periphery of the substrate, and a substrate lower surface holding surface configured to hold a lower surface of the substrate; and the substrate outer periphery holding surface and the substrate lower surface holding surface are spaced from each other.

13 . A substrate processing apparatus comprising:
a substrate transfer mechanism having a substrate transfer hand according to claim 1 ; and a processing unit configured to process a substrate transferred by the substrate transfer mechanism.

14 . A substrate processing apparatus comprising:
a substrate transfer mechanism having a substrate transfer hand according to claim 8 ; and a processing unit configured to process a substrate transferred by the substrate transfer mechanism.

15 . A substrate processing apparatus comprising:
a substrate transfer mechanism having a substrate transfer hand according to claim 12 ; and a processing unit configured to process a substrate transferred by the substrate transfer mechanism.

Assignees

• Ebara Corp

Inventors

• Maruyama Toru
• Motoshima Yasuyuki
• Eto Yohei

Classifications

• H10P72/7602 Primary

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• B65G2201/022

  Flat · CPC title

• B25J15/0014

  having fork, comb or plate shaped means for engaging the lower surface on a object to be transported · CPC title

• B25J15/0042

  V-shaped gripping surfaces · CPC title

• B65G47/90 Primary

  Devices for picking-up and depositing articles or materials · CPC title