Performance predictors for semiconductor-manufacturing processes
US-2026079478-A1 · Mar 19, 2026 · US
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Danek Michal patents
Danek Michal is listed as an inventor on 132 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Danek Michal |
| Total patents | 132 |
| First publication | Feb 5, 2015 |
| Latest publication | Mar 19, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Performance predictors for semiconductor-manufacturing processes
US-12530021-B2 · Jan 20, 2026 · US
Method for preventing line bending during metal fill process
US-2025323045-A1 · Oct 16, 2025 · US
Tungsten feature fill with nucleation inhibition
US-12444651-B2 · Oct 14, 2025 · US
Method for preventing line bending during metal fill process
US-12362188-B2 · Jul 15, 2025 · US
Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition
US-12331396-B2 · Jun 17, 2025 · US
Tungsten feature fill with nucleation inhibition
US-2025149383-A1 · May 8, 2025 · US
Evaluation of plasma uniformity using computer vision
US-2025140542-A1 · May 1, 2025 · US
Nucleation-free deposition
US-2025132201-A1 · Apr 24, 2025 · US
Metal deposition
US-2025115998-A1 · Apr 10, 2025 · US
Recent patents
Latest publications not already listed above.
Nucleation-free tungsten deposition
US-12237221-B2 · Feb 25, 2025 · US
Molybdenum deposition
US-2025029840-A1 · Jan 23, 2025 · US
Metal deposition
US-12203168-B2 · Jan 21, 2025 · US
Thermal imaging for analysis of device fabrication tools
US-2024410760-A1 · Dec 12, 2024 · US
Deposition of tungsten on molybdenum templates
US-12148623-B2 · Nov 19, 2024 · US
Generating digital twins of semiconductor manufacturing equipment
US-2024378347-A1 · Nov 14, 2024 · US
Low resistivity films containing molybdenum
US-2024297075-A1 · Sep 5, 2024 · US
Molybdenum deposition
US-12074029-B2 · Aug 27, 2024 · US
Image analysis of plasma conditions
US-2024234112-A1 · Jul 11, 2024 · US
Determination of recipes for manufacturing semiconductor devices
US-2024095432-A1 · Mar 21, 2024 · US
Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition
US-2024084443-A1 · Mar 14, 2024 · US
Feature fill with nucleation inhibition
US-11901227-B2 · Feb 13, 2024 · US
Predictive maintenance for semiconductor manufacturing equipment
US-2023400847-A1 · Dec 14, 2023 · US
Determination of recipes for manufacturing semiconductor devices
US-11836429-B2 · Dec 5, 2023 · US
Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition
US-11827976-B2 · Nov 28, 2023 · US
Self-limiting growth
US-2023290680-A1 · Sep 14, 2023 · US
Performance predictors for semiconductor-manufacturing processes
US-2023049157-A1 · Feb 16, 2023 · US
Tungsten feature fill with nucleation inhibition
US-2023041794-A1 · Feb 9, 2023 · US
Determination of recipe for manufacturing semiconductor
US-2022374572-A1 · Nov 24, 2022 · US
Molybdenum templates for tungsten
US-2022359211-A1 · Nov 10, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 106 |
| Novellus Systems Inc | 26 |
| Danek Michal | 3 |
| Humayun Raashina | 2 |
| Chen Feng | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/43 | 94 |
| H10W20/056 | 81 |
| H10W20/045 | 73 |
| H10P14/432 | 65 |
| C23C16/045 | 65 |