Plasma abatement of compounds containing heavy atoms
US-11185815-B2 · Nov 30, 2021 · US
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Cox Michael S patents
Cox Michael S is listed as an inventor on 77 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Cox Michael S |
| Total patents | 77 |
| First publication | Jan 22, 2015 |
| Latest publication | Nov 30, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus for exhaust cooling
US-11114285-B2 · Sep 7, 2021 · US
Non-disappearing anode for use with dielectric deposition
US-11114289-B2 · Sep 7, 2021 · US
Sputtering target with backside cooling grooves
US-11011356-B2 · May 18, 2021 · US
Smart chamber and smart chamber components
US-10930479-B2 · Feb 23, 2021 · US
Physical vapor deposition in-chamber electro-magnet
US-10867776-B2 · Dec 15, 2020 · US
High pressure rf-dc sputtering and methods to improve film uniformity and step-coverage of this process
US-2020357616-A1 · Nov 12, 2020 · US
Sputtering target with backside cooling grooves
US-2020294778-A1 · Sep 17, 2020 · US
High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process
US-10763090-B2 · Sep 1, 2020 · US
Method and apparatus for gas abatement
US-10757797-B2 · Aug 25, 2020 · US
Recent patents
Latest publications not already listed above.
Sputtering target with backside cooling grooves
US-10714321-B2 · Jul 14, 2020 · US
Arcing detection apparatus for plasma processing
US-10580626-B2 · Mar 3, 2020 · US
Physical vapor deposition in-chamber electro-magnet
US-2019348259-A1 · Nov 14, 2019 · US
Plasma abatement of compounds containing heavy atoms
US-10449486-B2 · Oct 22, 2019 · US
Method and apparatus for gas abatement
US-2019246481-A1 · Aug 8, 2019 · US
Gas cooled substrate support for stabilized high temperature deposition
US-10344375-B2 · Jul 9, 2019 · US
Transparent electrostatic carrier
US-10332773-B2 · Jun 25, 2019 · US
Smart chamber and smart chamber components
US-2019096643-A1 · Mar 28, 2019 · US
Wafer carrier for smaller wafers and wafer pieces
US-10236201-B2 · Mar 19, 2019 · US
Plasma abatement of compounds containing heavy atoms
US-2019022577-A9 · Jan 24, 2019 · US
Method and apparatus for gas abatement
US-10187966-B2 · Jan 22, 2019 · US
Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
US-10176973-B2 · Jan 8, 2019 · US
Smart chamber and smart chamber components
US-10153143-B2 · Dec 11, 2018 · US
Sputtering target with backside cooling grooves
US-2018342378-A1 · Nov 29, 2018 · US
Plasma abatement of compounds containing heavy atoms
US-2018318758-A1 · Nov 8, 2018 · US
Sputtering target with backside cooling grooves
US-10049863-B2 · Aug 14, 2018 · US
Locally heated multi-zone substrate support
US-9984912-B2 · May 29, 2018 · US
Gas cooled substrate support for stabilized high temperature deposition
US-2018037987-A1 · Feb 8, 2018 · US
Locally heated multi-zone substrate support
US-2018019148-A1 · Jan 18, 2018 · US
Sputtering target with backside cooling grooves
US-2018019108-A1 · Jan 18, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 77 |
| Ritchie Alan | 1 |
| Cox Michael S | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| Y02C20/30 | 24 |
| H10P72/722 | 22 |
| H01L21/6833 | 22 |
| H01J37/32669 | 20 |
| H01J37/3405 | 19 |