Multi-thermal CVD chambers with shared gas delivery and exhaust system
US-12037701-B2 · Jul 16, 2024 · US
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Burrows Brian H patents
Burrows Brian H is listed as an inventor on 21 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Burrows Brian H |
| Total patents | 21 |
| First publication | Jun 4, 2015 |
| Latest publication | Jul 16, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Chamber injector
US-11807931-B2 · Nov 7, 2023 · US
Methods and apparatus for depositing materials on a continuous substrate
US-11578004-B2 · Feb 14, 2023 · US
Chamber injector
US-2023027683-A1 · Jan 26, 2023 · US
Chamber injector
US-11492704-B2 · Nov 8, 2022 · US
Purged viewport for quartz dome in epitaxy reactor
US-11189508-B2 · Nov 30, 2021 · US
Multi-thermal cvd chambers with shared gas delivery and exhaust system
US-2021324514-A1 · Oct 21, 2021 · US
Methods and apparatus for gallium nitride deposition
US-10995419-B2 · May 4, 2021 · US
Methods and apparatus for gallium nitride deposition
US-2020332437-A1 · Oct 22, 2020 · US
Methods and apparatus for depositing materials on a continuous substrate
US-2020290932-A1 · Sep 17, 2020 · US
Recent patents
Latest publications not already listed above.
Continuous chemical vapor deposition (cvd) multi-zone process kit
US-2020291523-A1 · Sep 17, 2020 · US
Purged viewport for quartz dome in epitaxy reactor
US-2020105554-A1 · Apr 2, 2020 · US
Chamber injector
US-2020071832-A1 · Mar 5, 2020 · US
Tool architecture using variable frequency microwave for residual moisture removal of electrodes
US-2019132910-A1 · May 2, 2019 · US
Process gas preheating systems and methods for double-sided multi-substrate batch processing
US-9982364-B2 · May 29, 2018 · US
Parallel plate inline substrate processing tool
US-2017244006-A1 · Aug 24, 2017 · US
High speed epitaxy system and methods
US-2017221751-A1 · Aug 3, 2017 · US
Multi-gas straight channel showerhead
US-9644267-B2 · May 9, 2017 · US
High speed epi system and chamber concepts
US-2016348240-A1 · Dec 1, 2016 · US
Process gas preheating systems and methods for double-sided multi-substrate batch processing
US-2016298263-A1 · Oct 13, 2016 · US
Methods for substrate processing
US-2015155407-A1 · Jun 4, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 21 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/46 | 10 |
| C23C16/45502 | 8 |
| C23C16/45572 | 7 |
| C30B25/14 | 7 |
| C23C16/4408 | 6 |