Charged particle beam device and method for correcting astigmatism and numerical aperture
US-2026081098-A1 · Mar 19, 2026 · US
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Breuer John patents
Breuer John is listed as an inventor on 33 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Breuer John |
| Total patents | 33 |
| First publication | Jan 8, 2019 |
| Latest publication | Mar 19, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus for a charged particle beam device, charged particle beam device, method of analyzing a magnetic lens for a charged particle beam device, and non-transitory medium
US-2026066214-A1 · Mar 5, 2026 · US
Method of determining an energy spectrum or energy width of a charged particle beam, and charged particle beam imaging device
US-12562338-B2 · Feb 24, 2026 · US
Method of determining aberrations of a charged particle beam, method of determining cd information, corresponding generation of computational models, and corresponding systems
US-2026051029-A1 · Feb 19, 2026 · US
Method of forming a multipole device, method of influencing an electron beam, and multipole device
US-12451322-B2 · Oct 21, 2025 · US
Charged particle beam system, corrector for aberration correction of a charged particle beam, and method thereof
US-12412727-B2 · Sep 9, 2025 · US
Method of determining a brightness of a charged particle beam, method of determining a size of a source of the charged particle beam, and charged particle beam imaging device
US-12386164-B2 · Aug 12, 2025 · US
Methods of determining aberrations of a charged particle beam, and charged particle beam system
US-12308203-B2 · May 20, 2025 · US
Method of characterizing a detection path of a charged particle beam and a charged particle mirror
US-2025140511-A1 · May 1, 2025 · US
Method of determining a beam convergence of a charged particle beam, and charged particle beam system
US-2025037965-A1 · Jan 30, 2025 · US
Recent patents
Latest publications not already listed above.
Aberration corrector, a charged particle beam apparatus, a method of aligning an aberration corrector and a method of correcting aberration of a charged particle beam
US-2024355576-A1 · Oct 24, 2024 · US
Method of forming a multipole device, method of influencing an electron beam, and multipole device
US-2024274396-A1 · Aug 15, 2024 · US
Charged particle beam system, corrector for aberration correction of a charged particle beam, and method thereof
US-2024170249-A1 · May 23, 2024 · US
Method of determining a brightness of a charged particle beam, method of determining a size of a source of the charged particle beam, and charged particle beam imaging device
US-2024126057-A1 · Apr 18, 2024 · US
Primary charged particle beam current measurement
US-11817292-B2 · Nov 14, 2023 · US
Methods of determining aberrations of a charged particle beam, and charged particle beam system
US-11810753-B2 · Nov 7, 2023 · US
Methods of determining aberrations of a charged particle beam, and charged particle beam system
US-2023352268-A1 · Nov 2, 2023 · US
Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system
US-11791128-B2 · Oct 17, 2023 · US
Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system
US-2023116466-A1 · Apr 13, 2023 · US
Methods of determining aberrations of a charged particle beam, and charged particle beam system
US-2023113857-A1 · Apr 13, 2023 · US
Charged particle beam apparatus and method of controlling sample charge
US-11545338-B2 · Jan 3, 2023 · US
Aberration corrector and method of aligning aberration corrector
US-2022375713-A1 · Nov 24, 2022 · US
Aberration corrector and method of aligning aberration corrector
US-11501947-B1 · Nov 15, 2022 · US
Charged particle beam apparatus and method of controlling sample charge
US-2022359152-A1 · Nov 10, 2022 · US
Primary charged particle beam current measurement
US-2022208509-A1 · Jun 30, 2022 · US
Charged particle beam device with interferometer for height measurement
US-11257657-B2 · Feb 22, 2022 · US
Charged particle beam device with interferometer for height measurement
US-2021257182-A1 · Aug 19, 2021 · US
Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
US-10991544-B2 · Apr 27, 2021 · US
Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
US-2020381208-A1 · Dec 3, 2020 · US
Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets
US-10784072-B2 · Sep 22, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | 33 |
| Ict Integrated Circuit Testing Ges Fuer Halbleiterriftechnik Mbh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/28 | 26 |
| H01J37/153 | 20 |
| H01J2237/1534 | 13 |
| H01J37/10 | 13 |
| H01J37/244 | 12 |