Multi charged particle beam writing apparatus
US-2024242922-A1 · Jul 18, 2024 · US
Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01J37/153 |
| Official title | Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators |
| Display label | Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators |
| Total patents | 649 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is growing.
| Year | Patents |
|---|---|
| 2015 | 31 |
| 2016 | 32 |
| 2017 | 35 |
| 2018 | 43 |
| 2019 | 58 |
| 2020 | 67 |
| 2021 | 59 |
| 2022 | 73 |
| 2023 | 82 |
| 2024 | 65 |
| 2025 | 83 |
| 2026 | 21 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Charged particle beam device and arithmetic device
US-9530614-B2 · Dec 27, 2016 · US
Focusing a charged particle system
US-9530613-B2 · Dec 27, 2016 · US
Method and device for manipulating particle beam
US-2016343536-A1 · Nov 24, 2016 · US
Apparatus of Plural Charged-Particle Beams
US-2016336142-A1 · Nov 17, 2016 · US
Charged-particle-beam device and method for correcting aberration
US-9484182-B2 · Nov 1, 2016 · US
Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus
US-9484181-B2 · Nov 1, 2016 · US
Charged-Particle-Beam Device
US-2016300690-A1 · Oct 13, 2016 · US
Phase plate for a transmission electron microscope
US-9460890-B2 · Oct 4, 2016 · US
Method of generating a zoom sequence and microscope system configured to perform the method
US-2016284507-A1 · Sep 29, 2016 · US
Method of adjusting a stigmator in a particle beam apparatus and a Particle beam system
US-9455115-B2 · Sep 27, 2016 · US
Charged Particle Beam Device
US-2016233049-A1 · Aug 11, 2016 · US
Apparatus having a magnetic lens configured to diverge an electron beam
US-9390882-B2 · Jul 12, 2016 · US
Scanning charged particle beam device having an aberration correction aperture and method of operating thereof
US-2016189916-A1 · Jun 30, 2016 · US
Method of Adjusting a Stigmator in a Particle Beam Apparatus and a Particle Beam System
US-2016181055-A1 · Jun 23, 2016 · US
Apparatus and methods for aberration correction in electron beam based system
US-2016172151-A1 · Jun 16, 2016 · US
Multipole lens, aberration corrector, and electron microscope
US-9349565-B2 · May 24, 2016 · US
Desktop electron microscope and combined round-multipole magnetic lens thereof
US-9343261-B2 · May 17, 2016 · US
Multipole and charged particle radiation apparatus using the same
US-9343260-B2 · May 17, 2016 · US
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
US-2016111251-A1 · Apr 21, 2016 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H01J37/153?
- CPC H01J37/153 is the Cooperative Patent Classification code for “Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators.”
- How many patents are filed under CPC H01J37/153 (Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators)?
- Our database includes 649 publications tagged with this CPC code.
- Is patent activity under CPC H01J37/153 growing?
- Publication counts under this code: 65 in 2024 vs 83 in 2025 (latest complete years).