Charged particle beam apparatus and method of controlling sample charge

Patent metadata

Field	Value
Publication number	US-11545338-B2
Application number	US-202117308832-A
Country	US
Kind code	B2
Filing date	May 5, 2021
Priority date	May 5, 2021
Publication date	Jan 3, 2023
Grant date	Jan 3, 2023

Abstract

A charged particle beam apparatus with a charged particle source to generate a primary charged particle beam, a sample holder to hold a sample for impingement of the primary charged particle beam on the sample, a pulsed laser configured to generate a pulsed light beam for impingement onto an area on the sample, and an electrode to collect electrons emitted from the sample in a non-linear photoemission.

First claim

The invention claimed is:

1. A charged particle beam apparatus, comprising:
a charged particle source to generate a primary charged particle beam;
a sample holder to hold a sample for impingement of the primary charged particle beam on the sample;
a pulsed laser configured to generate a pulsed light beam for impingement onto an area on the sample; and
an electrode to collect electrons emitted from the sample in a non-linear photoemission.

2. The charged particle beam apparatus according to claim 1 , wherein the pulsed laser is configured to emit the pulsed light beam as an ultrashort light pulse with a pulse length of 1 picosecond or below.

3. The charged particle beam apparatus according to claim 2 , wherein the ultrashort light pulse has a peak power of more than 1 megawatt.

4. The charged particle beam apparatus according to claim 1 , the charged particle source further comprising an electrode configured to accelerate charged particles to form the primary charged particle beam;
a bender unit configured to adjust a path of the primary charged particle beam; and
an objective lens configured to focus the primary charged particle beam onto a spot comprised in the area on the sample, the primary charged particle beam passing through a bore of the objective lens as the primary charged particle beam propagates from the charged particle source to the sample.

5. The charged particle beam apparatus according to claim 4 , further comprising a mirror disposed within the bender unit and arranged to direct the pulsed light beam onto the area on the sample.

6. The charged particle beam apparatus according to claim 4 , further comprising an optical fiber arrangement to direct the pulsed light beam from the pulsed laser.

7. The charged particle beam apparatus according to claim 5 , wherein the mirror comprises an electrode to collect electrons emitted in a non-linear photoemission.

8. The charged particle beam apparatus according to claim 1 , wherein the charged particle beam apparatus comprises a focusing assembly to focus the pulsed light beam onto the area on the sample.

9. The charged particle beam apparatus according to claim 1 , further including an intensity modulator, the intensity modulator being configured to adjust the intensity of a pulse of the pulsed light beam generated by the pulsed laser to generate a non-linear photoemission of electrons from the sample, particularly the photon energy of the pulsed light beam being lower than the work function of the sample.

10. The charged particle beam apparatus according to claim 9 , wherein the intensity modulator includes one or more of the following to adjust the intensity of the pulsed light beam:
a focusing assembly to control the area impinged by the pulsed light beam;
a pulse-width modulator to control the duration of a pulse of the pulsed light beam;
a pulse power modulator to control the power of a pulse of the pulsed light beam;
an intensity attenuator to control the intensity of a pulse of the pulsed light beam.

11. The charged particle beam apparatus according to claim 1 , wherein the charged particle beam apparatus is configured for scanning the primary charged particle beam across a scanning area on the sample.

12. The charged particle beam apparatus according to claim 1 , further comprising a detector configured to detect signal charged particles generated on impingement of the primary charged particle beam on the sample.

13. An electron beam inspection system, comprising the charged particle beam apparatus according to claim 1 , the electron beam inspection system being configured for inspecting the sample.

14. The charged particle beam apparatus according to claim 1 , wherein the sample comprises at least one of
a semiconductor portion;
an insulating portion;
a photolithographic mask portion;
a calibration measurement target; or
a resolution measurement target.

15. The charged particle beam apparatus according to claim 1 , further comprising a controller, the controller being configured to control the pulsed laser to generate the pulsed light beam, the controller controlling the pulsed laser according to at least one of the following:
controlling the pulsed laser to generate a pulse of the pulsed light beam synchronized to a line-scan frequency or frame scan frequency of the charged particle beam; or
controlling the pulsed laser to generate a pulse of the pulsed light beam with a variable pulse intensity, the pulse intensity corresponding to a surface charge of the area on the sample.

16. A method of controlling sample charge in a vacuum chamber, including:
exposing a sample to radiation;
directing a pulsed light beam onto the sample;
the photon energy of the pulsed light beam being lower than the work function of the sample; and
a pulse of the pulsed light beam having an intensity to promote a non-linear photoemission of electrons from the sample.

Assignees

• Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh
• Ict Integrated Circuit Testing Ges Fuer Halbleiterriftechnik Mbh

Inventors

• Ehberger Dominik Patrick
• Breuer John
• Goldenshtein Alex

Classifications

• H01J2237/049

  Focusing means · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J2237/2817

  Pattern inspection · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/265

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title