Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system

Patent metadata

Field	Value
Publication number	US-2023116466-A1
Application number	US-202117500835-A
Country	US
Kind code	A1
Filing date	Oct 13, 2021
Priority date	Oct 13, 2021
Publication date	Apr 13, 2023
Grant date	—

Abstract

A method of determining a beam convergence of a charged particle beam ( 11 ) focused by a focusing lens ( 120 ) toward a sample ( 10 ) in a charged particle beam system ( 100 ) is provided. The method includes (a) taking one or more images of the sample when the sample is arranged at one or more defocus distances from a respective beam focus of the charged particle beam; (b) retrieving one or more beam cross sections from the one or more images; (c) determining one or more beam widths from the one or more beam cross sections; and (d) calculating at least one beam convergence value based on the one or more beam widths and the one or more defocus distances. Further, a charged particle beam system for imaging and/or inspecting a sample that is configured for any of the methods described herein is provided.

First claim

1 . A method of determining a beam convergence of a charged particle beam focused by a focusing lens toward a sample in a charged particle beam system, comprising
(a) taking one or more images of the sample when the sample is arranged at one or more defocus distances from a respective beam focus of the charged particle beam; (b) retrieving one or more beam cross sections from the one or more images; (c) determining one or more beam widths from the one or more beam cross sections; and (d) calculating at least one beam convergence value based on the one or more beam widths and the one or more defocus distances.

2 . The method of claim 1 , wherein the one or more defocus distances at which the one or more images are taken, or differences between the one or more defocus distances, are known in absolute values, and said absolute values are used for calculating the at least one beam convergence value in (d).

3 . The method of claim 1 , wherein the at least one beam convergence value comprises at least one of a change of beam width as a function of defocus distance, a beam convergence angle, and a numerical aperture of the charged particle beam.

4 . The method of claim 1 , wherein the at least one beam convergence value comprises a numerical aperture of the charged particle beam.

5 . The method of claim 1 , wherein
in (a), a plurality of images are taken when the sample is arranged at a plurality of different defocus distances; in (b), a plurality of beam cross sections are retrieved from the plurality of images; in (c), a plurality of beam widths are determined from the plurality of beam cross sections; and in (d), the at least one beam convergence value is calculated based on the plurality of beam widths and the plurality of defocus distances.

6 . The method of claim 5 , wherein a numerical aperture of the charged particle beam is calculated based on an average change of beam width as a function of defocus distance and a calibration factor.

7 . The method of claim 5 , wherein, in (a), a plurality of different focusing strengths are applied by the focusing lens for varying between the plurality of different defocus distances, and an image is taken at each of the plurality of different focusing strengths.

8 . The method of claim 7 , wherein a defocus distance variation as a function of focusing strength variation of the focusing lens is known or is determined in a preceding calibration.

9 . The method of claim 5 , wherein, in (a), a sample stage is moved relative to the focusing lens along an optical axis for varying between the plurality of different defocus distances, and an image is taken at each of the plurality of different defocus distances.

10 . The method of claim 5 , wherein at least one image of the plurality of images is taken at an overfocus distance and at least one image of the plurality of images is taken at an underfocus distance.

11 . The method of claim 1 , wherein, in (b), retrieving the one or more beam cross sections from the one or more images comprises dividing the one or more images in Fourier space by a focus image of the sample in Fourier space.

12 . The method of claim 11 , wherein retrieving the one or more beam cross sections from the one or more images further comprises at least one of a multiplication with an adaptive filter term and a multiplication with a focus beam cross section in Fourier space.

13 . The method of claim 1 , wherein each of the one or more beam widths is determined at two or more azimuthal angles, particularly as a function of azimuthal angle.

14 . The method of claim 13 , wherein the at least one beam convergence value comprises a first beam convergence value of the charged particle beam at a first azimuthal angle and a second beam convergence value of the charged particle beam at a second azimuthal angle, particularly wherein the at least one beam convergence value is calculated as a function of azimuthal angle.

15 . The method of claim 13 , wherein the at least one beam convergence value comprises a numerical aperture of the charged particle beam as a function of azimuthal angle.

16 . The method of claim 1 , further comprising at least one or more of the following:
at least one of generating and displaying a three-dimensional model of the charged particle beam; at least one of generating and displaying one or more two-dimensional representations of the charged particle beam in one or more selected azimuthal planes; and at least one of generating and displaying one or more one-dimensional representations of a beam width of the charged particle beam as a function of defocus distance.

17 . The method of claim 1 , further comprising modifying at least one beam influencing element based on the at least one beam convergence value for tailoring the charged particle beam.

18 . The method of claim 1 , further comprising determining one or more beam aberration coefficients of the charged particle beam by an iterative fitting routine that uses the at least one beam convergence value as an input parameter.

19 . A charged particle beam system, comprising:
a charged particle source for emitting a charged particle beam propagating along an optical axis; a sample stage; a focusing lens for focusing the charged particle beam toward a sample placed on the sample stage; a charged particle detector for detecting signal particles emitted from the sample; and a processor and a memory storing instructions that, when executed by the processor, cause the charged particle beam system to perform the method of claim 1 .

20 . A charged particle beam system, comprising:
a charged particle source for emitting a charged particle beam propagating along an optical axis; a sample stage; a focusing lens for focusing the charged particle beam toward a sample placed on the sample stage; a charged particle detector for detecting signal particles emitted from the sample; and a processor and a memory storing instructions that, when executed by the processor, cause the charged particle beam system
(x1) to retrieve one or more beam cross sections from one or more images of the sample taken at one or more defocus distances;
(x2) to determine one or more beam widths from the one or more beam cross sections; and
(x3) to calculate at least one beam convergence value based on the one or more beam widths and the one or more defocus distances.

Assignees

• Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh

Inventors

• Ehberger Dominik
• Breuer John
• Firnkes Matthias

Classifications

• H01J2237/24528

  Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece · CPC title

• H01J2237/223

  Fourier techniques · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/263

  Contrast, resolution or power of penetration · CPC title

• H01J37/222 Primary

  Image processing arrangements associated with the tube · CPC title