Apparatus for a charged particle beam device, charged particle beam device, method of analyzing a magnetic lens for a charged particle beam device, and non-transitory medium

Patent metadata

Field	Value
Publication number	US-2026066214-A1
Application number	US-202418819245-A
Country	US
Kind code	A1
Filing date	Aug 29, 2024
Priority date	Aug 29, 2024
Publication date	Mar 5, 2026
Grant date	—

Abstract

An apparatus for a charged particle beam device is described. The charged particle beam device includes: a magnetic lens with a coil carrier; at least one pole piece; and an electrical insulator configured to electrically insulate the coil carrier and the at least one pole piece from each other.

First claim

What is claimed is:

1 . An apparatus for a charged particle beam device, comprising:
a magnetic lens, comprising:
a coil carrier;
at least one pole piece; and
an electrical insulator configured to electrically insulate the coil carrier and the at least one pole piece from each other.

2 . The apparatus according to claim 1 , further comprising:
a measurement unit coupled to the coil carrier and the at least one pole piece, and configured to measure at least one electrical characteristic selected from:
a resistivity between the coil carrier and the at least one pole piece;
a conductance between the coil carrier and the at least one pole piece;
a capacitance between the coil carrier and the at least one pole piece; or
an inductance between the coil carrier and the at least one pole piece.

3 . The apparatus according to claim 2 , wherein the apparatus is configured to determine a defective state of the magnetic lens based at least in part on the at least one measured electrical characteristic.

4 . The apparatus according to claim 2 , wherein the apparatus is configured to determine a defective state based at least in part on comparing the at least one measured electrical characteristic with a respective predetermined threshold.

5 . The apparatus according to claim 3 , wherein the apparatus is configured to determine the defective state based at least in part on comparing the at least one measured electrical characteristic with a respective predetermined threshold.

6 . The apparatus according to claim 2 , the coil carrier comprising a first connector for electrically coupling to the measurement unit, and the at least one pole piece comprising a second connector for electrically coupling to the measurement unit.

7 . The apparatus according to claim 3 , being configured to trigger a warning and/or block an operational mode of the charged particle beam device if the defective state is determined.

8 . The apparatus according to claim 4 , being configured to trigger a warning and/or block an operational mode of the charged particle beam device if the defective state is determined.

9 . The apparatus according to claim 1 , the coil carrier comprising a conduit for a cooling agent for cooling the magnetic lens.

10 . The apparatus according to claim 9 , further comprising a cooling device for cooling the magnetic lens, the cooling device configured for applying the cooling agent to the conduit.

11 . The apparatus according to claim 1 , the electrical insulator comprising an insulating solid material.

12 . A charged particle beam device comprising:
an apparatus, comprising: a magnetic lens, comprising:
a coil carrier;
at least one pole piece; and
an electrical insulator configured to electrically insulate the coil carrier and the at least one pole piece from each other.

13 . The charged particle beam device according to claim 12 , the apparatus further comprising:
a measurement unit coupled to the coil carrier and the at least one pole piece, and configured to measure at least one electrical characteristic selected from:
a resistivity between the coil carrier and the at least one pole piece;
a conductance between the coil carrier and the at least one pole piece;
a capacitance between the coil carrier and the at least one pole piece; or
an inductance between the coil carrier and the at least one pole piece.

14 . The charged particle beam device according to claim 13 , the apparatus being configured to determine a defective state of the magnetic lens based at least in part on the at least one measured electrical characteristic.

15 . A method of analyzing a magnetic lens for a charged particle beam device, comprising:
measuring at least one electrical characteristic selected from:
a resistivity between a coil carrier and at least one pole piece from the magnetic lens;
a conductance between the coil carrier and the at least one pole piece;
a capacitance between the coil carrier and the at least one pole piece; and
an inductance between the coil carrier and the at least one pole piece.

16 . The method according to claim 15 , further comprising:
determining a defective state of the magnetic lens based at least in part on the at least one measured electrical characteristic.

17 . The method according to claim 16 , the determining of the defective state comprising:
comparing the at least one measured electrical characteristic with a respective predetermined threshold.

18 . The method according to claim 16 , further comprising:
triggering a warning and/or blocking an operational mode of the charged particle beam device if the defective state is determined.

19 . A non-transitory medium comprising instructions, that, when executed, causes one or more processors to perform a method of analyzing a magnetic lens for a charged particle beam device, comprising:
measuring at least one electrical characteristic selected from:
a resistivity between a coil carrier and at least one pole piece from the magnetic lens;
a conductance between the coil carrier and the at least one pole piece;
a capacitance between the coil carrier and the at least one pole piece; and
an inductance between the coil carrier and the at least one pole piece.

20 . The non-transitory medium according to claim 19 , the non-transitory medium further comprising instructions, that, when executed, cause the one or more processors to:
determine a defective state of the magnetic lens based at least in part on the at least one measured electrical characteristic.

Assignees

• Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh

Inventors

• Breuer John
• Kaupp Hanno
• Singer Markus
• Oron Gadi
• Idan Tamir

Classifications

• H01J37/141 Primary

  Electromagnetic lenses · CPC title