Optical metrology tool equipped with modulated illumination sources
US-11913874-B2 · Feb 27, 2024 · US
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Brady Gregory patents
Brady Gregory is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Brady Gregory |
| Total patents | 13 |
| First publication | Mar 17, 2015 |
| Latest publication | Feb 27, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Optical metrology tool equipped with modulated illumination sources
US-2021223166-A1 · Jul 22, 2021 · US
Reflective pupil relay system
US-10976249-B1 · Apr 13, 2021 · US
Optical metrology tool equipped with modulated illumination sources
US-10969328-B2 · Apr 6, 2021 · US
Optical Metrology Tool Equipped with Modulated Illumination Sources
US-2019195782-A1 · Jun 27, 2019 · US
Optical metrology tool equipped with modulated illumination sources
US-10215688-B2 · Feb 26, 2019 · US
Optical Metrology Tool Equipped with Modulated Illumination Sources
US-2017016815-A1 · Jan 19, 2017 · US
Optical metrology tool equipped with modulated illumination sources
US-9400246-B2 · Jul 26, 2016 · US
Multiple angles of incidence semiconductor metrology systems and methods
US-9310290-B2 · Apr 12, 2016 · US
Metrology system optimization for parameter tracking
US-9255877-B2 · Feb 9, 2016 · US
Recent patents
Latest publications not already listed above.
Multiple angles of incidence semiconductor metrology systems and methods
US-2015285735-A1 · Oct 8, 2015 · US
Multiple angles of incidence semiconductor metrology systems and methods
US-9116103-B2 · Aug 25, 2015 · US
Apparatus and method of measuring roughness and other parameters of a structure
US-8982358-B2 · Mar 17, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 12 |
| Kla Corp | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01N21/211 | 11 |
| G01B9/02 | 8 |
| G01N2021/213 | 8 |
| G01B11/0616 | 7 |
| G03F7/70625 | 7 |