Lithographic apparatus and device manufacturing method
US-10444644-B2 · Oct 15, 2019 · US
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Boogaard Arjen patents
Boogaard Arjen is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Boogaard Arjen |
| Total patents | 13 |
| First publication | Dec 15, 2015 |
| Latest publication | Oct 15, 2019 |
Notable patents
Publications ranked by popularity score, then publication date.
Lithographic apparatus and device manufacturing method
US-2019086820-A1 · Mar 21, 2019 · US
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
US-10228615-B2 · Mar 12, 2019 · US
Lithographic apparatus and device manufacturing method
US-10146143-B2 · Dec 4, 2018 · US
Lithographic apparatus and device manufacturing method
US-2018046095-A1 · Feb 15, 2018 · US
Lithographic apparatus and device manufacturing method
US-9804509-B2 · Oct 31, 2017 · US
Radiation source-collector and method for manufacture
US-9773578-B2 · Sep 26, 2017 · US
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
US-2017205704-A1 · Jul 20, 2017 · US
Lithographic apparatus and device manufacturing method
US-2017176876-A1 · Jun 22, 2017 · US
Lithographic apparatus and device manufacturing method
US-9594308-B2 · Mar 14, 2017 · US
Recent patents
Latest publications not already listed above.
Lithographic apparatus and device manufacturing method
US-2016070178-A1 · Mar 10, 2016 · US
Radiation Source-Collector and Method for Manufacture
US-2016012929-A1 · Jan 14, 2016 · US
Lithographic apparatus and device manufacturing method
US-9213247-B2 · Dec 15, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 13 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/7085 | 9 |
| G03F7/70866 | 9 |
| G03F7/7095 | 9 |
| G03F7/70591 | 9 |
| G03F7/70341 | 9 |