Semiconductor vapor etching device with intermediate chamber
US-2026018432-A1 · Jan 15, 2026 · US
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Blomberg Tom E patents
Blomberg Tom E is listed as an inventor on 92 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Blomberg Tom E |
| Total patents | 92 |
| First publication | Apr 9, 2015 |
| Latest publication | Jan 15, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Deposition of oxides and nitrides
US-12359315-B2 · Jul 15, 2025 · US
Thermal atomic layer etching processes
US-12320012-B2 · Jun 3, 2025 · US
Thermal atomic layer etching processes
US-12312696-B2 · May 27, 2025 · US
Showerhead device for semiconductor processing system
US-2025167013-A1 · May 22, 2025 · US
Thermal atomic layer etching processes
US-2025154662-A1 · May 15, 2025 · US
Combination CVD/ALD method, source and pulse profile modification
US-12241156-B2 · Mar 4, 2025 · US
Showerhead device for semiconductor processing system
US-12237182-B2 · Feb 25, 2025 · US
Atomic layer etching processes
US-2025037970-A1 · Jan 30, 2025 · US
Showerhead device for semiconductor processing system
US-2024332039-A1 · Oct 3, 2024 · US
Recent patents
Latest publications not already listed above.
Atomic layer etching processes
US-12094686-B2 · Sep 17, 2024 · US
Atomic layer deposition of III-V compounds to form V-NAND devices
US-11956977-B2 · Apr 9, 2024 · US
Showerhead device for semiconductor processing system
US-11948813-B2 · Apr 2, 2024 · US
Thermal atomic layer etching processes
US-2024026548-A1 · Jan 25, 2024 · US
Thermal atomic layer etching processes
US-2023374671-A1 · Nov 23, 2023 · US
Fluorine-containing conductive films
US-11823976-B2 · Nov 21, 2023 · US
Thermal atomic layer etching processes
US-11739428-B2 · Aug 29, 2023 · US
Thermal atomic layer etching processes
US-11739427-B2 · Aug 29, 2023 · US
Atomic layer etching processes
US-2023253182-A1 · Aug 10, 2023 · US
Atomic layer etching processes
US-11640899-B2 · May 2, 2023 · US
Showerhead device for semiconductor processing system
US-2023102839-A1 · Mar 30, 2023 · US
Fluorine-containing conductive films
US-2023085443-A1 · Mar 16, 2023 · US
Process for passivating dielectric films
US-11549177-B2 · Jan 10, 2023 · US
Combination CVD/ALD method, source and pulse profile modification
US-2022316057-A1 · Oct 6, 2022 · US
Fluorine-containing conductive films
US-11450591-B2 · Sep 20, 2022 · US
Showerhead device for semiconductor processing system
US-11437249-B2 · Sep 6, 2022 · US
Combination CVD/ALD method, source and pulse profile modification
US-11365478-B2 · Jun 21, 2022 · US
Photoactive devices and materials
US-11362222-B2 · Jun 14, 2022 · US
Thermal atomic layer etching processes
US-2022119961-A1 · Apr 21, 2022 · US
Thermal atomic layer etching processes
US-2022119962-A1 · Apr 21, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 77 |
| Asm Int Nv | 16 |
| Asm Ip Holdings B V | 1 |
| Blomberg Tom E | 1 |
| Tois Eva E | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P50/242 | 41 |
| H10P50/283 | 37 |
| H10P50/266 | 32 |
| H01J37/32009 | 32 |
| C23F1/12 | 32 |