Process for passivating dielectric films

Patent metadata

Field	Value
Publication number	US-11549177-B2
Application number	US-201916709108-A
Country	US
Kind code	B2
Filing date	Dec 10, 2019
Priority date	Oct 20, 2009
Publication date	Jan 10, 2023
Grant date	Jan 10, 2023

Abstract

Methods are disclosed herein for depositing a passivation layer comprising fluorine over a dielectric material that is sensitive to chlorine, bromine, and iodine. The passivation layer can protect the sensitive dielectric layer thereby enabling deposition using precursors comprising chlorine, bromine, and iodine over the passivation layer.

First claim

We claim:

1. A process for forming a titanium nitride containing thin film on a substrate comprising a high-k surface in a reaction chamber, the process comprising:
depositing a first titanium nitride layer comprising F by at least one deposition cycle comprising:
providing titanium fluoride into the reaction chamber in a vapor phase to contact the substrate; and
providing nitrogen containing vapor phase reactant to the reaction chamber such that the nitrogen containing vapor phase reactant reacts with the titanium fluoride to form a first titanium nitride layer; and

subsequently depositing a second titanium nitride layer over the formed first titanium nitride layer, wherein the second titanium nitride layer is deposited using a titanium precursor comprising chlorine, bromine or iodine, thereby forming the titanium nitride containing thin film.

2. The process of claim 1 , wherein the process for depositing the first titanium nitride layer is an atomic layer deposition (ALD) process.

3. The process of claim 1 , wherein the process for depositing the first titanium nitride layer is a chemical vapor deposition (CVD) or a pulsed CVD process.

4. The process of claim 1 , additionally comprising removing excess titanium fluoride from the reaction chamber after providing the titanium fluoride into the reaction chamber and before providing the nitrogen containing vapor phase reactant to the reaction chamber.

5. The process of claim 1 , wherein in the at least one deposition cycle the titanium fluoride forms no more than about a single molecular layer on the substrate.

6. The process of claim 1 , wherein the formed titanium nitride containing thin film has a work function above about 5.0 eV.

7. The process of claim 1 , wherein the formed titanium nitride containing thin film has a work function above about 5.2 eV.

8. The process of claim 1 , wherein the substrate is susceptible to chloride, bromide, or iodide attack.

9. The process of claim 1 , wherein the high-k surface comprises hafnium or zirconium.

10. The process of claim 1 , wherein the formed titanium nitride containing thin film is formed on top of a dielectric film comprising Sr or B a.

11. The process of claim 10 , wherein the dielectric film comprises SrTi x O y , BaTi x O y , Sr x Ba (1-x) Ti y O z or SrBi x Ta y O z .

12. The process of claim 1 , wherein less than 10 deposition cycles are performed.

13. The process of claim 1 , wherein the first titanium nitride layer has a thickness of less than about 15 Å.

14. The process of claim 1 , wherein the first titanium nitride layer serves as a passivation layer.

15. The process of claim 1 , wherein the nitrogen containing vapor phase reactant comprises NH 3 or N-containing plasma.

16. The process of claim 15 , wherein the nitrogen containing vapor phase reactant comprises NH 3 .

17. The process of claim 1 , wherein the first titanium nitride layer comprises greater than 0.5 at-% F.

18. The process of claim 1 , wherein the first titanium nitride layer comprises greater than 2 at-% F.

19. The process of claim 1 , wherein the first titanium nitride layer comprises greater than 5 at-% F.

Assignees

• Asm Int Nv

Inventors

• Blomberg Tom E
• Tois Eva E
• Huggare Robert
• Maes Jan Willem
• Machkaoutsan Vladimir
• Pierreux Dieter

Classifications

• C23C16/34 Primary

  Nitrides {(C23C16/303 takes precedence)} · CPC title

• C23C16/45531 Primary

  specially adapted for making ternary or higher compositions · CPC title

• C23C16/409

  of the type ABO3 with A representing alkali, alkaline earth metal or lead and B representing a refractory metal, nickel, scandium or a lanthanide · CPC title

• C23C16/45527

  characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations · CPC title

• C23C16/36

  Carbonitrides · CPC title