Glass ceramic for ultraviolet lithography and method of manufacturing thereof
US-11493841-B2 · Nov 8, 2022 · US
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Beasley Cara patents
Beasley Cara is listed as an inventor on 34 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Beasley Cara |
| Total patents | 34 |
| First publication | Aug 20, 2015 |
| Latest publication | Nov 8, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
US-10788744-B2 · Sep 29, 2020 · US
Glass Ceramic For Ultraviolet Lithography And Method Of Manufacturing Thereof
US-2020142292-A1 · May 7, 2020 · US
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor
US-2020058213-A9 · Feb 20, 2020 · US
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
US-10551732-B2 · Feb 4, 2020 · US
Glass ceramic for ultraviolet lithography and method of manufacturing thereof
US-10551731-B2 · Feb 4, 2020 · US
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor
US-2019130731-A1 · May 2, 2019 · US
System and method for manufacturing planarized extreme ultraviolet lithography blank
US-10209613-B2 · Feb 19, 2019 · US
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
US-10197907-B2 · Feb 5, 2019 · US
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor
US-10012897-B2 · Jul 3, 2018 · US
Recent patents
Latest publications not already listed above.
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof
US-10012908-B2 · Jul 3, 2018 · US
Growing graphene on substrates
US-2018158677-A1 · Jun 7, 2018 · US
Growing graphene on substrates
US-9905418-B2 · Feb 27, 2018 · US
Extreme ultraviolet capping layer and method of manufacturing and lithography thereof
US-9739913-B2 · Aug 22, 2017 · US
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof
US-9690016-B2 · Jun 27, 2017 · US
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor
US-2017160632-A1 · Jun 8, 2017 · US
Growing graphene on substrates
US-2017148631-A1 · May 25, 2017 · US
Planarized Extreme Ultraviolet Lithography Blank With Absorber And Manufacturing System Therefor
US-2017131627-A1 · May 11, 2017 · US
Extreme Ultraviolet Reflective Element With Multilayer Stack And Method Of Manufacturing Thereof
US-2017131637-A1 · May 11, 2017 · US
Extreme Ultraviolet Lithography Mask Blank Manufacturing System And Method Of Operation Therefor
US-2017115555-A1 · Apr 27, 2017 · US
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
US-9612522-B2 · Apr 4, 2017 · US
Growing graphene on substrates
US-9595436-B2 · Mar 14, 2017 · US
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor
US-9581889-B2 · Feb 28, 2017 · US
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof
US-9581890-B2 · Feb 28, 2017 · US
Glass ceramic for ultraviolet lithography and method of manufacturing thereof
US-2016377972-A1 · Dec 29, 2016 · US
System and method for manufacturing planarized extreme ultraviolet lithography blank
US-2016274454-A1 · Sep 22, 2016 · US
Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor
US-9417515-B2 · Aug 16, 2016 · US
Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor
US-9354508-B2 · May 31, 2016 · US
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
US-2016011499-A1 · Jan 14, 2016 · US
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof
US-2016011345-A1 · Jan 14, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 34 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/24 | 21 |
| G03F7/70033 | 19 |
| G03F1/22 | 17 |
| G03F7/70958 | 12 |
| G03F1/52 | 11 |