Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor

Patent metadata

Field	Value
Publication number	US-9612522-B2
Application number	US-201514620114-A
Country	US
Kind code	B2
Filing date	Feb 11, 2015
Priority date	Jul 11, 2014
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

An extreme ultraviolet (EUV) mask blank production system includes: a substrate handling vacuum chamber for creating a vacuum; a substrate handling platform, in the vacuum, for transporting an ultra-low expansion substrate loaded in the substrate handling vacuum chamber; and multiple sub-chambers, accessed by the substrate handling platform, for forming an EUV mask blank includes: a multi-layer stack, formed above the ultra-low expansion substrate, for reflecting an extreme ultraviolet (EUV) light, and an absorber layer, formed above the multi-layer stack, for absorbing the EUV light at a wavelength of 13.5 nm includes the absorber layer has a thickness of less than 80 nm and less than 2% reflectivity.

First claim

What is claimed is:

1. An extreme ultraviolet (EUV) mask blank production system comprising:
a substrate handling vacuum chamber for creating a vacuum;
a substrate handling platform, in the vacuum, for transporting an ultra-low expansion substrate loaded in the substrate handling vacuum chamber; and
multiple sub-chambers, accessed by the substrate handling platform, for forming an EUV mask blank including:
a multi-layer stack, formed above the ultra-low expansion substrate, for reflecting an extreme ultraviolet (EUV) light, and
an absorber layer, formed above the multi-layer stack, for absorbing the EUV light at a wavelength of 13.5 nm includes the absorber layer has a thickness of less than 80 nm and less than 2% reflectivity, wherein the absorber layer includes a single layer of Nickel (Ni), Platinum (Pt), Silver (Ag), Zinc (Zn), Tin (Sn), Gold (Au), Lead (Pb), Indium (In), Hafnium (Hf), Cadmium (Cd), Bismuth (Bi), Antimony (Sb), or Tellurium (Te).

2. The system as claimed in claim 1 wherein the EUV mask blank further comprising a capping layer, between the multi-layer stack and the absorber layer, for protecting the multi-layer stack.

3. The system as claimed in claim 1 wherein the EUV mask blank reflects the EUV light at the wavelength of 13.5 nm includes adjusting a percent of reflectivity by controlling the thickness of the absorber layer.

4. The system as claimed in claim 1 further comprising:
a substrate handling platform in the substrate handling vacuum chamber for loading the ultra-low expansion substrate; and
wherein the multiple sub-chambers for forming the EUV mask blank includes:
an additional multi-layer stack formed above the ultra-low expansion substrate, and
wherein the multi-layer stack is tuned to reflect the EUV light at a wavelength of 13.5 nm.

5. The system as claimed in claim 1 further comprising an additional multi-layer stack formed between the ultra-low expansion substrate and the absorber layer, wherein the additional multi-layer stack includes a plurality of the multi-layer stack.

6. The system as claimed in claim 1 wherein the absorber layer is in the range of 10 nm to 83 nm thick.

7. An extreme ultraviolet (EUV) mask blank system comprising:
an ultra-low expansion substrate;
a multi-layer stack over the ultra-low expansion substrate; and
an absorber layer, over the multi-layer stack, with a thickness of less than 80 nm and less than 2% reflectivity of an extreme ultraviolet (EUV) light at a wavelength of 13.5 nm, wherein the absorber layer includes a single layer of Nickel (Ni), Platinum (Pt), Silver (Ag), Zinc (Zn), Tin (Sn), Gold (Au), Lead (Pb), Indium (In), Hafnium (Hf), Cadmium (Cd), Bismuth (Bi), Antimony (Sb), or Tellurium (Te).

8. The system as claimed in claim 7 further comprising a capping layer, between the multi-layer stack and the absorber layer, for protecting the multi-layer stack.

9. The system as claimed in claim 7 further comprising an additional multi-layer stack formed between the ultra-low expansion substrate and the absorber layer, wherein the additional multi-layer stack includes a plurality of the multi-layer stack.

10. The system as claimed in claim 7 further comprising an additional multi-layer stack formed directly on a planarization layer and the multi-layer stack formed on the additional multi-layer stack.

11. The system as claimed in claim 7 further comprising an additional multi-layer stack includes up to 60 of the multi-layer stack formed in a vertical stack.

12. The system as claimed in claim 7 wherein the absorber layer is in the range of 10 nm to 83 nm thick.

Assignees

• Applied Materials Inc

Inventors

• Hassan Vinayak Vishwanath
• Foad Majeed A
• Beasley Cara
• Hofmann Ralf

Classifications

• G06F16/25

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