Growing graphene on substrates

Patent metadata

Field	Value
Publication number	US-9905418-B2
Application number	US-201715427367-A
Country	US
Kind code	B2
Filing date	Feb 8, 2017
Priority date	Oct 25, 2012
Publication date	Feb 27, 2018
Grant date	Feb 27, 2018

Abstract

Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

First claim

The invention claimed is:

1. An uncatalyzed method of growing graphitic carbon on a substrate, comprising:
depositing a hydrocarbon layer directly on a silicon containing substrate from a precursor comprising a linear conjugated hydrocarbon and a solvent;
evaporating the solvent before applying energy to the hydrocarbon layer; and
forming a graphitic layer from the hydrocarbon layer by applying energy to the hydrocarbon layer.

2. The method of claim 1 , wherein the solvent is an aprotic solvent.

3. The method of claim 1 , wherein the aprotic solvent is benzene.

4. The method of claim 1 , wherein evaporating the solvent is performed under an inert atmosphere comprising nitrogen, argon, hydrogen, or a combination thereof.

5. The method of claim 1 , further comprises removing evaporated solvent with a drying agent or filter from a deposition chamber.

6. The method of claim 1 , wherein the precursor further comprises a polynuclear aromatic compound.

7. The method of claim 6 , wherein the precursor has a viscosity less than about 3.0 cP at room temperature.

8. The method of claim 1 , wherein depositing the hydrocarbon layer on the substrate comprises adhering molecules from the precursor to a surface of the substrate.

9. The method of claim 1 , wherein the energy is selected from the group consisting of UV energy, plasma energy, thermal energy, and combinations thereof.

10. The method of claim 1 , wherein the precursor has a viscosity less than about 3.0 cP at room temperature.

11. The method of claim 1 , wherein the precursor further comprises an oxygen-containing solvent.

12. The method of claim 1 , wherein the linear conjugated hydrocarbon is butadiene.

13. The method of claim 12 , wherein the precursor further comprises a polynuclear aromatic compound.

14. The method of claim 1 , wherein the graphitic carbon layer is at least about 80% graphene.

15. The method of claim 1 , wherein depositing comprises spin coating the precursor onto the substrate.

16. An uncatalyzed method of forming graphene on a substrate, comprising:
providing a precursor comprising a linear unsaturated hydrocarbon, an aromatic hydrocarbon, and benzene;
directly depositing molecules from the precursor on the silicon containing substrate; and
reacting the molecules to form graphene by applying energy to the molecules.

17. The method of claim 16 , wherein the precursor further comprises an oxygen-containing solvent.

18. An uncatalyzed method of forming graphene on a substrate, comprising:
depositing a hydrocarbon layer on a silicon containing substrate from a precursor comprising a linear conjugated hydrocarbon and a solvent;
evaporating the solvent before applying energy to the hydrocarbon layer; and
forming a graphene layer from the hydrocarbon layer by applying energy to the hydrocarbon layer using a staged UV exposure, wherein the staged UV exposure comprises:
exposing the hydrocarbon layer to UV energy in a first exposure operation; and
exposing the hydrocarbon layer to the UV energy in a second exposure operation after the first exposure operation.

19. The method of claim 18 , wherein the staged UV exposure further comprises:
a rest period between the first exposure operation and the second exposure operation.

20. The method of claim 18 , wherein the first exposure operation utilizes UV energy having a first power density selected to convert the hydrocarbon layer to graphene and the second exposure operation utilizes UV energy having a second power density selected to increase a grain size of the graphene formed during the first exposure operation.

Assignees

• Applied Materials Inc

Inventors

• Beasley Cara
• Hofmann Ralf
• Foad Majeed A

Classifications

• H10P14/6536

  by exposure to radiation, e.g. visible light · CPC title

• H10P14/6532

  by exposure to a plasma · CPC title

• H10P14/6516

  of treatments performed after formation of the materials · CPC title

• H10P14/2903

  Carbon, e.g. diamond-like carbon · CPC title

• H10P14/2901

  Materials · CPC title