Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof

Patent metadata

Field	Value
Publication number	US-10012908-B2
Application number	US-201715410048-A
Country	US
Kind code	B2
Filing date	Jan 19, 2017
Priority date	Jul 11, 2014
Publication date	Jul 3, 2018
Grant date	Jul 3, 2018

Abstract

An apparatus and method of manufacture of an extreme ultraviolet reflective element includes: a substrate; a multilayer stack on the substrate, the multilayer stack includes a plurality of reflective layer pairs having a first reflective layer formed from silicon and a second reflective layer formed from niobium or niobium carbide for forming a Bragg reflector; and a capping layer on and over the multilayer stack for protecting the multilayer stack by reducing oxidation and mechanical erosion.

First claim

What is claimed is:

1. An extreme ultraviolet lithography system comprising:
an extreme ultraviolet light source which produces extreme ultraviolet (EUV) light;
a reflective mask which reflects the EUV light, the reflective mask comprising a multilayer stack on a substrate, the multilayer stack including a plurality of reflective layer pairs having a first reflective layer formed from silicon and a second reflective layer formed from niobium or niobium carbide forming a Bragg reflector; and
a capping layer on and over the multilayer stack to protect the multilayer stack by reducing oxidation and mechanical erosion.

2. The extreme ultraviolet lithography system of claim 1 , wherein the multilayer stack includes the first reflective layer formed from silicon having a thickness from 3.5 to 4.15 nanometers and the second reflective layer formed from niobium having a thickness of 3.5 nanometers or niobium carbide having a thickness of 2.8 nanometers.

3. The extreme ultraviolet lithography system of claim 1 , wherein the multilayer stack includes a barrier layer between the first reflective layer and the second reflective layer, the barrier layer formed from carbon and having a thickness between 1 angstrom and 5 angstroms.

4. The extreme ultraviolet lithography system of claim 3 , wherein the barrier layer reduces formation of silicide.

5. The extreme ultraviolet lithography system of claim 1 , wherein the multilayer stack includes a barrier layer between the multilayer stack and the capping layer, the barrier layer formed from carbon and having a thickness between 1 angstrom and 5 angstroms.

6. The extreme ultraviolet lithography system of claim 5 , wherein the barrier layer reduces formation of silicide.

7. The extreme ultraviolet lithography system of claim 1 , wherein the multilayer stack includes a barrier layer between the multilayer stack and the substrate, the barrier layer formed from carbon and having a thickness between 1 angstrom and 5 angstroms.

8. The extreme ultraviolet lithography system of claim 7 , wherein the barrier layer reduces formation of silicide.

9. The extreme ultraviolet lithography system of claim 1 , wherein the multilayer stack includes:
a barrier layer between the first reflective layer and the second reflective layer, the barrier layer formed from carbon and having a thickness of 5 angstroms; and
a boundary layer of silicide between the first reflective layer and the second reflective layer, the boundary layer having a reduced thickness based on the barrier layer.

10. The extreme ultraviolet lithography system of claim 1 , wherein the capping layer includes the capping layer formed from ruthenium or a ruthenium alloy and an absorber layer on and over the capping layer, the absorber layer formed from chromium, tantalum, nitrides, nickel, or a combination thereof.

11. The extreme ultraviolet lithography system of claim 1 , wherein the extreme ultraviolet light is electromagnetic radiation having a wavelength in the range of 5 to 50 nanometers.

12. The extreme ultraviolet lithography system of claim 11 , further comprising condenser to reflect and focus the extreme ultraviolet light from the extreme ultraviolet light source to illuminate the reflective mask.

13. The extreme ultraviolet lithography system of claim 12 , wherein the condenser includes one or more reflective elements selected from concave mirrors, convex mirrors, flat mirrors, or a combination thereof.

14. The extreme ultraviolet lithography system of claim 12 , wherein the condenser comprises a single concave mirror.

15. The extreme ultraviolet lithography system of claim 11 , wherein the reflective mask includes a mask pattern.

16. The extreme ultraviolet lithography system of claim 15 , further comprising an optical reduction assembly to reduce an image of the mask pattern produced by EUV light reflected from the reflective mask.

17. The extreme ultraviolet lithography system of claim 16 , wherein the optical reduction assembly comprises a concave mirror.

18. The extreme ultraviolet lithography system of claim 16 , wherein the optical reduction assembly causes the mask patter to be imaged at a 4:1 ratio on a target wafer to form a circuitry represented by the mask pattern.

Assignees

• Applied Materials Inc

Inventors

• Hofmann Ralf
• Hassan Vinayak Vishwanath
• Beasley Cara
• Foad Majeed A

Classifications

• C23C14/0635

  Carbides · CPC title

• G03F7/70316 Primary

  Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements · CPC title

• G03F7/702 Primary

  Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems · CPC title

• G21K1/062

  Devices having a multilayer structure · CPC title

• G03F7/70958

  Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties · CPC title