System and method for dynamic loadlock pressure control
US-2025210378-A1 · Jun 26, 2025 · US
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Baggett John patents
Baggett John is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Baggett John |
| Total patents | 12 |
| First publication | May 17, 2018 |
| Latest publication | Jun 26, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Large range heated electrostatic chuck
US-2025183085-A1 · Jun 5, 2025 · US
Method for decreasing cool down time with heated system for semiconductor manufacturing equipment
US-11728187-B2 · Aug 15, 2023 · US
Active workpiece heating or cooling for an ion implantation system
US-2021366746-A1 · Nov 25, 2021 · US
Substrate support having customizable and replaceable features for enhanced backside contamination performance
US-11114330-B2 · Sep 7, 2021 · US
Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipment
US-11011397-B2 · May 18, 2021 · US
Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipment
US-2020203199-A1 · Jun 25, 2020 · US
Method for decreasing cool down time with heated system for semiconductor manufacturing equipment
US-2020203196-A1 · Jun 25, 2020 · US
Substrate support having customizable and replaceable features for enhanced backside contamination performance
US-2020066570-A1 · Feb 27, 2020 · US
Wafer temperature control with consideration to beam power input
US-10128084-B1 · Nov 13, 2018 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Axcelis Tech Inc | 12 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 9 |
| H10P72/0602 | 9 |
| H01L21/6833 | 9 |
| H01L21/67248 | 9 |
| H10P72/0434 | 7 |