Axcelis Tech Inc patents

Axcelis Tech Inc holds 248 patents in our database, with recent filings and technology areas summarized below.

Company patent statistics
MetricValue
Total patents248
Recent patents74
First publicationJan 1, 2015
Latest publicationMar 10, 2026

Filing trend

Year-over-year patent counts for this assignee.

Filing activity over the last five years is rapidly growing.

Patents filed per year
YearPatents
201521
201618
201724
201827
201922
202031
202115
20228
202320
202410
202543
20269
Browse patents by year
YearPatents
201521
201618
201724
201827
201922
202031
202115
20228
202320
202410
202543
20269

Recent patents

Latest publications where this party is an assignee.

Notable patents

Representative or frequently cited publications from precomputed assignee stats.

Top CPC classifications

Most common classification codes in this portfolio.

Top CPC codes by patent count
CPCPatents
H01J37/3171191
H01J37/0896
H01J2237/3170155
C23C14/4851
H01J2237/02242

Technology areas

Mapped technology topics for this assignee.

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Frequently asked questions

Answers are generated from the same data shown on this page.

How many patents does Axcelis Tech Inc have in patentsdb?
Axcelis Tech Inc is linked to 248 publications as assignee in our database.
What technology areas does Axcelis Tech Inc patent most?
Top mapped technology areas by patent count: Electricity (248); Chemistry & Metallurgy (57); Physics (27).
Is Axcelis Tech Inc's patent activity growing?
In our data, assignee counts were 10 in 2024 and 43 in 2025 (higher year over year).
What are recent patents assigned to Axcelis Tech Inc?
See the “Recent patents” section above for the latest 5 publications we attribute to this assignee.