Support apparatus for plasma adjustment, method for adjusting plasma, and storage medium
US-2017372877-A1 · Dec 28, 2017 · US
Waveguides
Waveguides · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01J37/32229 |
| Official title | {Waveguides} |
| Display label | Waveguides |
| Total patents | 334 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 26 |
| 2016 | 23 |
| 2017 | 30 |
| 2018 | 24 |
| 2019 | 37 |
| 2020 | 33 |
| 2021 | 33 |
| 2022 | 23 |
| 2023 | 24 |
| 2024 | 36 |
| 2025 | 38 |
| 2026 | 7 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Microwave supply apparatus, plasma processing apparatus, and plasma processing method
US-9852892-B1 · Dec 26, 2017 · US
Microwave plasma processing apparatus and microwave plasma processing method
US-2017358835-A1 · Dec 14, 2017 · US
Compact microwave plasma applicator utilizing conjoining electric fields
US-2017345622-A1 · Nov 30, 2017 · US
Antenna, microwave plasma source including the same, plasma processing apparatus, and method of manufacturing semiconductor device
US-2017330727-A1 · Nov 16, 2017 · US
Microwave chemical processing
US-9812295-B1 · Nov 7, 2017 · US
Methods and apparatus for microwave plasma assisted chemical vapor deposition reactors
US-2017271132-A1 · Sep 21, 2017 · US
Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide
US-2017125219-A1 · May 4, 2017 · US
Radial waveguide systems and methods for post-match control of microwaves
US-2017110290-A1 · Apr 20, 2017 · US
Method and apparatus for treating substrate
US-2017087602-A1 · Mar 30, 2017 · US
Radial waveguide systems and methods for post-match control of microwaves
US-9564296-B2 · Feb 7, 2017 · US
Integrated induction coil and microwave antenna as an all-planar source
US-9530621-B2 · Dec 27, 2016 · US
Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus
US-9520272-B2 · Dec 13, 2016 · US
Microwave plasma source and plasma processing apparatus
US-2016358757-A1 · Dec 8, 2016 · US
High density microwave plasma generation apparatus, and magnetron sputtering deposition system using the same
US-9506142-B2 · Nov 29, 2016 · US
Composite conducting wire, method for manufacturing the same, and apparatus for manufacturing the same
US-2016314878-A1 · Oct 27, 2016 · US
Microwave automatic matcher and plasma processing apparatus
US-2016268101-A1 · Sep 15, 2016 · US
System to continuously produce carbon fiber via microwave assisted plasma processing
US-9427720-B2 · Aug 30, 2016 · US
Guided wave applicator with non-gaseous dielectric for plasma chamber
US-9397380-B2 · Jul 19, 2016 · US
Workpiece processing chamber having a rotary microwave plasma antenna with slotted spiral waveguide
US-2016196955-A1 · Jul 7, 2016 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H01J37/32229?
- CPC H01J37/32229 is the Cooperative Patent Classification code for “Waveguides.”
- How many patents are filed under CPC H01J37/32229 (Waveguides)?
- Our database includes 334 publications tagged with this CPC code.
- Is patent activity under CPC H01J37/32229 growing?
- Publication counts under this code: 36 in 2024 vs 38 in 2025 (latest complete years).