Microwave supply apparatus, plasma processing apparatus, and plasma processing method

Patent metadata

Field	Value
Publication number	US-9852892-B1
Application number	US-201715626905-A
Country	US
Kind code	B1
Filing date	Jun 19, 2017
Priority date	Jun 20, 2016
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

A microwave supply apparatus includes a waveguide, a circulator, and a matcher, a first port of the circulator receives a microwave from an input end. First and second ends of the waveguide are coupled to second and third ports of the circulator, respectively. The matcher is provided between the input end and the first port of the circulator. The waveguide includes a rectangular waveguide having first and second walls facing each other, and third and fourth walls facing each other. A slot hole is formed in the first wall, and the slot hole is provided at a region deviated to the third wall side. The waveguide includes a first ridge portion provided therein. The first ridge portion faces the slot hole, is in contact with the second wall and third wall, and is separated from the first wall and fourth wall.

First claim

What is claimed is:

1. A microwave supply apparatus for supplying a microwave for generation of plasma, the apparatus comprising:
a waveguide including a first end and a second end, and extending between the first end and the second end;
a circulator including a first port, a second port coupled to the first end, and a third port coupled to the second end, the circulator being configured to propagate the microwave coming from an input end of the microwave supply apparatus, from the first port to the second port, and return the microwave received at the third port, from the first port to a side of the input end; and
a matcher provided between the input end and the first port of the circulator, the matcher being configured to reflect a part of the microwave returned from the first port to the side of the input end, to the first port of the circulator,
wherein the waveguide includes a rectangular waveguide, the rectangular waveguide including a first wall and a second wall that face each other, and a third wall and a fourth wall that intersect with the first wall and the second wall and face each other,
wherein a slot hole extending along a propagation direction of the microwave in the waveguide is formed in the first wall, and the slot hole is provided in a region deviated to a side of the third wall,
wherein the waveguide includes a first ridge portion provided in the waveguide, and
wherein the first ridge portion has a rectangular parallelepiped shape, is separated from the first wall, faces the slot hole, is in contact with the second wall and the third wall, and is separated from the fourth wall.

2. The microwave supply apparatus according to claim 1 ,
wherein a width of the first ridge portion in a first direction in which the third wall and the fourth wall are facing each other is larger than 18 mm and smaller than 52 mm.

3. The microwave supply apparatus according to claim 1 ,
wherein a height of the first ridge portion in a second direction in which the first wall and the second wall are facing each other is larger than 7.5 mm and smaller than a height of the waveguide in the second direction.

4. The microwave supply apparatus according to claim 1 , further comprising:
second ridge portions provided continuously to both ends of the first ridge portion in the propagation direction,
wherein each of the second ridge portions has a rectangular parallelepiped shape, is separated from the first wall, and is in contact with the second wall and the third wall, and to be separated from the fourth wall, and
wherein a length of a gap between the first wall and each of the second ridge portions is larger than a gap between the first wall and the first ridge portion.

5. The microwave supply apparatus according to claim 4 ,
a height of each of the second ridge portions in a direction in which the first wall and the second wall are facing each other is not less than 14 mm and not more than 18 mm.

6. The microwave supply apparatus according to claim 1 , further comprising:
a gas supply hole to introduce a processing gas for generation of plasma into the waveguide.

7. The microwave supply apparatus according to claim 1 , further comprising:
a microwave generator configured to generate a microwave and to supply the microwave to the input end.

8. A plasma processing apparatus comprising:
the microwave supply apparatus according to claim 7 ;
a gas supply unit configured to supply a processing gas to the slot hole; and
a chamber body providing a chamber for processing a workpiece therein by plasma of the processing gas.

9. A plasma processing method in which the plasma processing apparatus according to claim 8 is used, the method comprising:
accommodating a workpiece in the chamber; and
processing the workpiece by plasma of the processing gas supplied from the gas supply unit.

10. The plasma processing method according to claim 9 ,
wherein the processing gas contains a molecular gas, and a ratio of a flow rate of the molecular gas to a total flow rate of the processing gas is not less than 0.2 and not more than 1.

11. The plasma processing method according to claim 10 ,
wherein the molecular gas is nitrogen gas.

Assignees

• Tokyo Electron Ltd
• Univ Nagoya Nat Univ Corp

Inventors

• Itoh Hitoshi
• Hori Masaru
• Toyoda Hirotaka
• Suzuki Haruka
• Sekine Makoto

Classifications

• H01J37/32229

  Waveguides · CPC title

• H01J2237/2482

  Optical means · CPC title

• H01J37/32311 Primary

  Circuits specially adapted for controlling the microwave discharge · CPC title

• H01J37/32449

  Gas control, e.g. control of the gas flow · CPC title