Radial waveguide systems and methods for post-match control of microwaves

Patent metadata

Field	Value
Publication number	US-9564296-B2
Application number	US-201615063849-A
Country	US
Kind code	B2
Filing date	Mar 8, 2016
Priority date	Mar 20, 2014
Publication date	Feb 7, 2017
Grant date	Feb 7, 2017

Abstract

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals in response to a correction signal. The system also includes first and second electronics sets, each of which amplifies a respective one of the first and second microwave signals. The system transmits the amplified, first and second microwave signals into the radial waveguide, and matches an impedance of the amplified microwave signals to an impedance presented by the waveguide. The system also includes at least two monitoring antennas disposed within the waveguide. A signal controller receives analog signals from the monitoring antennas, determines the digital correction signal based at least on the analog signals, and transmits the correction signal to the signal generator.

First claim

What is claimed is:

1. A system that controls microwaves in a radial waveguide, comprising:
the radial waveguide;
a plurality of electronics sets, wherein each electronics set:
receives and amplifies an input microwave signal having a frequency, a phase and an amplitude, to form an amplified microwave signal, and
transmits the amplified microwave signal into a respective location of the radial waveguide,
wherein the frequencies of the input microwave signals received by each of the plurality of electronics sets are the same;

at least one monitoring antenna within the radial waveguide that provides an analog signal responsive to microwaves at a location of the monitoring antenna; and
a controller that receives the analog signal, and in response to the analog signal, adjusts at least one of the phase and the amplitude of the input microwave signal provided to one or more of the plurality of electronics sets, to achieve a predetermined condition at the location of the monitoring antenna.

2. The system as recited in claim 1 , wherein in response to the analog signal, the controller that receives the analog signal adjusts both the phase and the amplitude of the input microwave signal provided to one or more of the plurality of electronics sets, to achieve the predetermined condition.

3. The system as recited in claim 1 , further comprising:
a target input device configured to provide a target parameter to the controller;
and wherein:
the controller adjusts the at least one of the phase and the amplitude of the input microwave signal based on the analog signal and the target parameter.

4. The system as recited in claim 1 , wherein a first one of the electronics sets includes:
a tuner that matches an impedance of a first one of the amplified microwave signals to an impedance presented by the radial waveguide;
a dummy load; and
a circulator that shunts power reflected by the radial waveguide back to the first one of the electronics sets, into the dummy load.

5. The system as recited in claim 4 , wherein the controller adjusts the at least one of the phase and the amplitude of the input microwave signal, and the tuner matches the impedance, concurrently with one another.

6. The system as recited in claim 1 , wherein the monitoring antenna is disposed proximate to the location at which at least one of the electronics sets transmits the amplified microwave signal into the radial waveguide.

7. The system as recited in claim 1 ,
comprising at least two of the monitoring antennas that provide respective ones of the at least one analog signal responsive to microwaves at respective locations of each of the monitoring antennas; and wherein
the controller receives the respective analog signals and adjusts at least the at least one of the phase and the amplitude of the input microwave signal provided to one or more of the plurality of electronics sets, to achieve the predetermined condition at the respective locations of each of the monitoring antennas.

8. The system as recited in claim 7 , wherein:
a first one of the monitoring antennas is disposed 90 degrees about a circumference of the radial waveguide from the location at which a first one of the electronics sets transmits a first one of the amplified microwave signals into the radial waveguide; and
a second one of the monitoring antennas is disposed 90 degrees about the circumference of the radial waveguide from the location at which a second one of the electronics sets transmits a second one of the amplified microwave signals into the radial waveguide.

9. The system as recited in claim 1 , wherein the monitoring antenna comprises a loop antenna that measures a magnetic field to provide the analog signal.

10. The system as recited in claim 1 , further comprising a signal generator that provides the input microwave signals, wherein:
the controller adjusts at least the at least one of the phase and the amplitude of the input microwave signal provided to the one or more of the plurality of electronics sets to achieve the predetermined condition by providing a digital correction signal to the signal generator, and
the signal generator adjusts the at least one of the phase and the amplitude of the input microwave signal to one of the electronics sets relative to at least one of the phase and the magnitude of the input microwave signal to another one of the electronics sets, in response to the digital correction signal.

11. A system that controls microwaves in a radial waveguide, comprising:
the radial waveguide;
a plurality of electronics sets, wherein each electronics set:
receives and amplifies an input microwave signal having a frequency, a phase and an amplitude, to form an amplified microwave signal, and
transmits the amplified microwave signal into a respective location of the radial waveguide,
wherein the frequencies of the input microwave signals received by each of the plurality of electronics sets are the same;

at least one monitoring antenna within the radial waveguide that provides an analog signal responsive to microwaves at a location of the monitoring antenna; and
a controller that receives the analog signal, and in response to the analog signal, adjusts at least one of the phase and the amplitude of the input microwave signal provided to one or more of the plurality of electronics sets, to achieve a predetermined condition at the location of the monitoring antenna;
wherein the controller comprises:
a high frequency clock generator that produces a high frequency reference signal;
a control clock generator that produces a low frequency control signal;
an in-phase and quadrature-phase demodulator that produces a first digital in-phase signal Xi and a first digital quadrature phase signal Xq from the analog signal; and
a microcontroller that generates a correction signal based at least in part on Xi and Xq, the correction signal specifying adjustment information that, when utilized by the system to adjust the at least one of the phase and the amplitude of the input microwave signal provided to one or more of the plurality of electronics sets, produces one or more changes in the analog signal toward the predetermined condition.

12. A signal corrector that provides a correction signal for a microwave apparatus that transmits microwaves at a common frequency into a microwave chamber from at least two locations, the correction signal specifying an adjustment for the microwaves so as to correct at least one analog signal received from a location within the microwave chamber toward a predetermined condition, the signal corrector comprising:
a high frequency clock generator that produces a high frequency reference signal;
a control clock generator that produces a low frequency control signal;
an in-phase and quadrature-phase demodulator that produces a first digital in-phase signal Xi and a first digital quadrature phase signal Xq from the at least one analog signal; and
a microcontroller that generates the correction signal based at least in part on Xi and Xq, the correction signal specifying adjustment information that, when utilized by the microwave apparatus to adjust at least one of a phase and an amplitude of the microwaves transmitted into the microwave chamber from at least one of the locations, produces one or more changes in the at least one analog signal toward the predetermined condition.

13. The signal corrector of claim 12 , wherein the in-phase and quadrature-phase demodulator produces the first digital in-phase signal Xi and the first digital quadrature phase signal Xq from the at least one analog signal by:
mixing the analog signal with the high frequency r

Assignees

• Applied Materials Inc

Inventors

• Kobayashi Satoru
• Park Soonam
• Lubomirsky Dmitry
• Sugai Hideo

Classifications

• H05B41/16

  in which the lamp is fed by DC or by low-frequency AC, e.g. by 50 cycles/sec AC {, or with network frequencies} · CPC title

• H01J19/80

  Structurally associated resonator having distributed inductance and capacitance · CPC title

• H01J37/32302

  Plural frequencies · CPC title

• H01J37/32229 Primary

  Waveguides · CPC title

• H01J37/3299

  Feedback systems · CPC title