Guided wave applicator with non-gaseous dielectric for plasma chamber

Patent metadata

Field	Value
Publication number	US-9397380-B2
Application number	US-201213360652-A
Country	US
Kind code	B2
Filing date	Jan 27, 2012
Priority date	Jan 28, 2011
Publication date	Jul 19, 2016
Grant date	Jul 19, 2016

Abstract

A guided wave applicator comprising two electrically conductive waveguide walls and a waveguide dielectric. The volume of the waveguide dielectric is composed of non-gaseous dielectric material and is positioned between the two waveguide walls. The waveguide dielectric includes first and second longitudinal ends and includes first, second, third and fourth sides extending longitudinally between the two longitudinal ends. The first waveguide wall is positioned so that it covers the first side of the waveguide dielectric, and the second waveguide wall is positioned so that it covers the second side of the waveguide dielectric. In operation, electrical power can be supplied to one or both longitudinal ends of the waveguide dielectric, whereby the power can be coupled to a plasma through the exposed sides of the waveguide dielectric.

First claim

The invention claimed is:

1. A method for coupling electrical power to a plasma, comprising the steps of:
providing a plasma chamber having an interior;
providing first and second waveguide walls, wherein each waveguide wall is electrically conductive;
providing within the interior of the plasma chamber a waveguide dielectric whose volume is composed of non-gaseous dielectric material, wherein the waveguide dielectric includes:
(i) first and second longitudinal ends, and
(ii) first, second, third and fourth sides that extend longitudinally between the two longitudinal ends; and

coupling electrical power from an electrical generator to at least one of the longitudinal ends of the waveguide dielectric;
wherein:
the waveguide dielectric is positioned between the two waveguide walls;
the first waveguide wall is positioned so that it covers the first side of the waveguide dielectric;
the second waveguide wall is positioned so that it covers the second side of the waveguide dielectric; and
a portion of each of the third and fourth sides of the waveguide dielectric is not covered by the waveguide walls and is exposed to the interior of the plasma chamber.

2. The method of claim 1 , wherein:
at least half the surface area of each of the third and fourth sides of the waveguide dielectric is not covered by the waveguide walls and is exposed to the interior of the plasma chamber.

3. The method of claim 1 , wherein:
at least half the surface area of each of the third and fourth sides of the waveguide dielectric is not covered by any electrically conductive solid object and is exposed to the interior of the plasma chamber.

4. The method of claim 1 , wherein:
the first and second longitudinal ends of the waveguide dielectric are opposite each other;
the first and second sides of the waveguide dielectric are opposite each other; and
the third and fourth sides of the waveguide dielectric are opposite each other.

5. The method of claim 1 , wherein:
the third and fourth sides of the waveguide dielectric have a greater transverse width than the first and second sides of the waveguide dielectric.

6. The method of claim 1 , wherein:
the waveguide dielectric is shaped as a parallelepiped.

7. The method of claim 1 , wherein:
each of the first and second sides of the waveguide dielectric has a planar surface; and
the first waveguide wall and the second waveguide wall each has a planar surface that covers the first side and the second side, respectively, of the waveguide dielectric.

8. The method of claim 1 , further comprising the step of:
coupling electrical power from an electrical generator to at least one of the longitudinal ends of the waveguide dielectric.

9. The method of claim 1 , further comprising the step of:
coupling microwave power from a microwave generator to at least one of the longitudinal ends of the waveguide dielectric.

10. The method of claim 1 , wherein:
the waveguide dielectric is composed of a solid dielectric material.

11. The method of claim 1 , wherein:
the waveguide dielectric consists of a monolithic, non-segmented dielectric material.

12. The method of claim 1 , wherein:
the waveguide dielectric comprises a plurality of segments of dielectric material that are not connected directly together and that are distributed along the longitudinal dimension of the guided wave applicator.

13. The method of claim 1 , wherein:
the waveguide dielectric comprises a plurality of segments of dielectric material that are not connected directly together; and
the segments are separated by gaps that are sufficiently small so as to prevent the formation of a plasma within the gaps in response to said electrical power.

14. The method of claim 1 , wherein:
the waveguide dielectric comprises a plurality of segments of dielectric material that are not connected directly together and that are distributed along the longitudinal dimension of the guided wave applicator;
each segment has a transverse cross-section in the shape of a trapezoid having first and second legs, a short base, and a long base parallel to the short base, wherein the two legs respectively extend between the short base and the long base at respective acute angles relative to the long base;
the short base of each successive segment faces in opposite directions; and
the segments are sufficiently close together that the first leg of each segment overlaps the second leg of an adjacent one of the segments.

15. The method of claim 1 , wherein:
the waveguide dielectric comprises a plurality of segments of dielectric material that are not connected directly together and that are distributed along the longitudinal dimension of the guided wave applicator;
each segment has a transverse cross-section in the shape of a trapezoid having a short base and a long base; and
the short base of each successive segment is mechanically connected to an alternate one of the two waveguide walls.

16. The method of claim 1 , further comprising the step of:
providing a process gas conduit within a first one of the waveguide walls;
wherein the first waveguide wall has a surface exposed to the interior of the plasma chamber; and
the process conduit has a longitudinal axis parallel to said surface of the first waveguide wall and is coupled to a plurality of gas outlets at said surface of the first waveguide wall.

17. The method of claim 1 , further comprising:
providing a tongue-in-groove joint between the first waveguide wall and the first side of the waveguide dielectric;
wherein the tongue-in-groove joint permits relative movement between the waveguide dielectric and the first waveguide wall along a direction extending between the first and second longitudinal ends of the waveguide dielectric.

18. The method of claim 1 , wherein:
the first waveguide wall includes a first flange and a second flange;
the first flange covers a portion of the third side of the waveguide dielectric adjacent to the first side of the waveguide dielectric;
the second flange covers a portion of the fourth side of the waveguide dielectric adjacent to the first side of the waveguide dielectric; and
the first and second flanges permit relative movement between the waveguide dielectric and the first waveguide wall.

19. A method for coupling electrical power to a plasma, comprising the steps of:
providing one or more guided wave applicators within a plasma chamber, wherein each guided wave applicator comprises:
(i) first and second waveguide walls, wherein each waveguide wall is electrically conductive, and
(ii) a waveguide dielectric whose volume is composed of non-gaseous dielectric material, wherein the waveguide dielectric is positioned between the two waveguide walls, and wherein the waveguide dielectric includes first and second longitudinal ends and first, second, third and fourth sides that extend longitudinally between the first and second longitudinal ends; and

coupling electrical power from an electrical generator to at least one of the longitudinal ends of the waveguide dielectric of each guided wave applicator;
wherein, for each respective guided wave applicator:
the first waveguide wall of said respective guided wave applicator is positioned so that it covers the first side of the waveguide dielectric of said respective guided wave applicator;
the second waveguide wall of said respective guided wave applicator is positioned so that it covers the second side of the waveguide dielectric of said respective guided wave applicator; and
a portion of

Assignees

• Kudela Jozef
• Tanaka Tsutomu
• Sorensen Carl A
• Anwar Suhail
• White John M
• Applied Materials Inc

Inventors

• Kudela Jozef
• Tanaka Tsutomu
• Sorensen Carl A
• Anwar Suhail
• White John M

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P14/00

  Formation of materials, e.g. in the shape of layers or pillars · CPC title

• H01L21/02104

  Electricity · mapped topic

• H01P3/16 Primary

  Dielectric waveguides, i.e. without a longitudinal conductor · CPC title

• H05H1/46 Primary

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title