Substrate processing apparatus
US-2019369509-A1 · Dec 5, 2019 · US
Details
Details · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01J37/02 |
| Official title | Details |
| Display label | Details |
| Total patents | 141 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 12 |
| 2016 | 16 |
| 2017 | 11 |
| 2018 | 15 |
| 2019 | 8 |
| 2020 | 16 |
| 2021 | 13 |
| 2022 | 6 |
| 2023 | 17 |
| 2024 | 12 |
| 2025 | 12 |
| 2026 | 3 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Portable information terminal, beam irradiation system, and program
US-10485087-B2 · Nov 19, 2019 · US
Method and system for charge control for imaging floating metal structures on non-conducting substrates
US-10460903-B2 · Oct 29, 2019 · US
Substrate processing apparatus
US-10324385-B2 · Jun 18, 2019 · US
Control of impedance of RF return path
US-10249476-B2 · Apr 2, 2019 · US
Processing apparatus and processing method
US-2019035698-A1 · Jan 31, 2019 · US
Ion implant plasma flood gun performance by using trace in situ cleaning gas in sputtering gas mixture
US-2018337020-A1 · Nov 22, 2018 · US
Assessment and calibration of a high energy beam
US-2018308657-A1 · Oct 25, 2018 · US
Plasma processing apparatus
US-2018301313-A1 · Oct 18, 2018 · US
Method of burying sample trench
US-2018282870-A1 · Oct 4, 2018 · US
Portable information terminal, beam irradiation system, and program
US-2018288865-A1 · Oct 4, 2018 · US
Gas injection system for ion beam device
US-10062548-B2 · Aug 28, 2018 · US
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
US-2018236505-A1 · Aug 23, 2018 · US
Plasma processing apparatus and temperature control method
US-10056223-B2 · Aug 21, 2018 · US
Assessment and calibration of a high energy beam
US-10049852-B2 · Aug 14, 2018 · US
Multi-Column Scanning Electron Microscopy System
US-2018226219-A1 · Aug 9, 2018 · US
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
US-9981293-B2 · May 29, 2018 · US
Plasma processing method
US-9953811-B2 · Apr 24, 2018 · US
Method of producing a freestanding thin film of nano-crystalline graphite
US-9908778-B2 · Mar 6, 2018 · US
Magnet used with a plasma cleaner
US-2018053638-A1 · Feb 22, 2018 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H01J37/02?
- CPC H01J37/02 is the Cooperative Patent Classification code for “Details.”
- How many patents are filed under CPC H01J37/02 (Details)?
- Our database includes 141 publications tagged with this CPC code.
- Is patent activity under CPC H01J37/02 growing?
- Publication counts under this code: 12 in 2024 vs 12 in 2025 (latest complete years).