Portable information terminal, beam irradiation system, and program

Patent metadata

Field	Value
Publication number	US-10485087-B2
Application number	US-201815936183-A
Country	US
Kind code	B2
Filing date	Mar 26, 2018
Priority date	Mar 28, 2017
Publication date	Nov 19, 2019
Grant date	Nov 19, 2019

Abstract

A portable information terminal is separated from a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam. The portable information terminal performs operation of a first operation item at a desired position and includes a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating the first operation item based on operation by a user, the first operation item being one or more operation items among a plurality of items operable in the charged particle beam irradiation apparatus.

First claim

What is claimed is:

1. A portable information terminal separate from a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam, the portable information terminal comprising:
a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating a first operation item based on operation by a user, the first operation item being a part of operation items among a plurality of operation items operable in the charged particle beam irradiation apparatus; and
an output controller causing an output unit to output an output of a type according to the first operation item assigned to the GUI operated by the user, wherein
different first operation items are assigned to the GUI, and
the output unit is a speaker, and the output controller causes the output unit to output an audible sound of the type as the output of the type.

2. The portable information terminal of claim 1 , wherein the first operation item includes an operation item related to a state of the charged particle beam.

3. The portable information terminal of claim 2 , wherein the operation item related to the state of the charged particle beam includes at least some among acceleration voltage, beam current, lens modes, aligner, beam shift, OL values, and stigma values.

4. The portable information terminal of claim 1 , wherein the first operation item includes an operation item related to detection sensitivity at which a secondary particle radiated from the sample irradiated with the charged particle beam is detected.

5. The portable information terminal of claim 4 , wherein the operation item related to the detection sensitivity includes at least one of contrast and brightness.

6. The portable information terminal of claim 1 , further comprising:
an image generating part generating an observation image of the sample based on information indicating the secondary particle radiated from the sample irradiated with the charged particle beam,
wherein the display controller causes the display unit to display the observation image generated by the image generating part at a predetermined position in the image.

7. The portable information terminal of claim 1 , wherein the display controller places, in the image, the GUI at a position according to operation received from the user.

8. The portable information terminal of claim 1 , wherein the output controller causes the output unit to output an audible sound of a level according to a level of operation performed by the user with respect to the GUI operated by the user.

9. The portable information terminal of claim 8 , wherein the portable information terminal is communicably connected to the control device wirelessly.

10. The portable information terminal of claim 1 , wherein the display unit is a touch panel; and
the output controller does not output the sound of the type from the output unit when the user does not move a touch position where the user touches while the user touches a region where the GUI is displayed on the touch panel.

11. The portable information terminal of claim 1 , wherein the charged particle beam irradiation apparatus is communicably connected to a control device controlling the charged particle beam irradiation apparatus; and
the portable information terminal, is communicably connected to the control device and operates the first operation item via the control device according to operation received from the user.

12. The portable information terminal of claim 1 , wherein the portable information terminal is one of a tablet PC, a smart phone or a personal digital assistant.

13. The portable information terminal of claim 1 , wherein the portable information terminal is configured to be carried by hand.

14. A beam irradiation system comprising:
a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam; and
a portable information terminal separate from the charged particle beam irradiation apparatus,
wherein the portable information terminal includes a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating a first operation item based on operation by a user, the first operation item being at least a part of operation items among operation items operable in the charged particle beam irradiation apparatus; and
an output controller causing an output unit to output an output of a type according to the first operation item assigned to the GUI operated by the user, wherein
different first operation items are assigned to the GUI, and
the output unit is a speaker and the output controller causes the output unit to output an audible sound of the type as the output of the type.

15. The beam irradiation system of claim 14 , wherein the output controller causes the output unit to output an audible sound of a level according to a level of operation performed by the user with respect to the GUI operated by the user.

16. The beam irradiation system of claim 14 , wherein the portable information terminal is one of a tablet PC, a smart phone or a personal digital assistant.

17. The beam irradiating system of claim 14 , wherein the portable information terminal is configured to be carried by hand.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Aso Takuma
• Uemoto Atsushi
• Asahata Tatsuya
• Suzuki Masato

Classifications

• H05H7/00

  Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00 · CPC title

• H05H7/001 Primary

  Arrangements for beam delivery or irradiation (irradiation systems per se G21K5/00) · CPC title

• H05H2007/004

  for modifying beam energy, e.g. spread out Bragg peak devices · CPC title

• H01J2237/304

  Controlling tubes · CPC title

• H01J37/02 Primary

  Details · CPC title